Abstract
The evolution of LEDs, lasers and HEMTs using gallium nitride as the semiconductor has taught us about its many unique capabilities including high breakdown electric field, polarization-induced high charge density in the channel and reliable operation at high temperature, to name a few. These superior performances due to GaN’s exceptional material properties make GaN ideal for power switching besides RF applications. Thus, power electronics got recently added to GaN’s portfolio showing great progress. Lateral HEMTs, already available as products for RF application, were the obvious first choice for designing power electronic switches. The last ten years have witnessed an incredibly fast advancement in the lateral HEMT technology building a market space for GaN in medium (up to 15 kW) power electronic applications. Although the maximum industrially feasible and economically viable limits of power conversion using the lateral GaN technology are yet to be determined, vertical devices start to look attractive for power conversion ranging above 15–20 kW. The availability of bulk GaN substrates has stimulated the development of vertical GaN technology. Vertical GaN devices, analogous to Si-DMOSFETs in some ways, can uniquely be designed with a high-mobility AlGaN/GaN channel combined to a thick-drift region in bulk GaN to offer very low on-resistance and high breakdown voltage—the two key parameters of benchmarking a power switch. While the channel of a vertical device can be designed either horizontally or vertically along the sidewalls, the peak electric fields in these devices are always buried in the bulk material, far from the surface. This allows the device to be reasonably dispersion-free without involving field plates, unlike used in lateral HEMTs. Attaining high electron mobility in bulk GaN that forms the drift region will be of key importance to outperform the competing technologies based on Si and SiC. This chapter will focus on the design space, challenges, current performance, cost and roadmap of vertical GaN devices for next-generation power conversion.
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References
Jayant Baliga B (2008) Fundamentals of power semiconductor devices. Springer, New York
Kadavelugu A, Baliga V, Bhattacharya S, Das M, Agarwal A (2011) Zero voltage switching performance of 1200 V SiC MOSFET, 1200 V silicon IGBT and 900 V CoolMOS MOSFET. In: IEEE energy conversion congress and exposition (ECCE), Phoenix, AZ
Mishra UK, Parikh P, Wu YF (2002) AlGaN/GaN HEMTs-an overview of device operation and application. Proc IEEE 90(6):1022–1031
Dora Y, Chakraborty A, McCarthy L, Keller S, Denbaars SP, Mishra UK (2006) High breakdown voltage achieved on AlGaN/GaN HEMTs with integrated slant field plates. IEEE Electron Device Lett 27(9):713–715
Selvaraj SL, Suzue T, Egawa T (2009) Breakdown enhancement of AlGaN/GaN HEMTs on 4-in silicon by improving the GaN quality on thick buffer layers. IEEE Electron Device Lett 30(6):587–589
Lu B, Palacios T (2010) High breakdown (>1500 V) AlGaN/GaN HEMTs by substrate-transfer technology. IEEE Electron Device Lett 31(9):951–953
Chu R, Corrion A, Chen M, Ray L, Wong D, Zehnder D, Hughes B, Boutros K (2011) 1200-V normally off GaN-on-Si field-effect transistors with low dynamic on–resistance. IEEE Electron Device Lett 32(5):632–634
Chowdhury S, Mishra UK (2013) Lateral and vertical transistors using the AlGaN/GaN heterostructure. IEEE Trans Electron Devices 60(10):3060–3066
Ben-Yaacov I, Seck Y-K, Mishra UK, Denbaars SP (2004) AlGaN/GaN current aperture vertical electron transistors with regrown channels. J Appl Phys 95(4):2073–2078
Gao Y, Stonas A, Ben-Yaacov I, Mishra U, Denbaars S, Hu E (2003) AlGaN∕GaN current aperture vertical electron transistors fabricated by photoelectrochemical wet etching. Electron Lett 39(1):148
Chowdhury S, Swenson BL, Mishra UK (2008) Enhancement and depletion mode AlGaN/GaN CAVET with Mg-Ion-implanted GaN as current blocking layer. IEEE Electron Device Lett 29(6):543–545
Chowdhury S, Wong MH, Swenson BL, Mishra UK (2012) CAVET on bulk GaN substrates achieved with MBE-regrown AlGaN/GaN layers to suppress dispersion. IEEE Electron Device Lett 33(1):41–43
Kanechika M, Sugimoto M, Soeima N, Ueda H, Ishiguro O, Kodama M, Hayashi E, Itoh K, Uesugi T, Kachi T (2007) A vertical insulated gate AlGaN/GaN heterojunction field effect transistor. Jpn J Appl Phys 46(21):L503–L505
Otake H, Chikamatsu K, Yamaguchi A, Fujishima T, Ohta H (2008) Vertical GaN-based trench gate metal oxide semiconductor field-effect transistors on GaN bulk substrates. Appl Phys Express 1:011105-1–011105-3
Nie H, Diduck Q, Alvarez B, Edwards A, Kayes B, Zhang M, Bour D, Kizilyalli DI (2014) 1.5 kV and 2.2 mΩ cm2 vertical GaN transistors on bulk-GaN substrates. IEEE Electron Device Lett 35(9):939–941
Oka T, Ina T, Ueno Y, Nishii J (2015) 1.8 mΩ cm2 vertical GaN-based trench metal–oxide–semiconductor field-effect transistors on a free-standing GaN substrate for 1.2-kV-class operation. Appl Phys Express 8(5):054101
Okada M, Saitoh Y, Yokoyama M, Nakata K, Yaegassi S, Katayama K, Ueno M, Kiyama M, Katsuyama T, Nakamura T (2010) Novel vertical heterojunction field-effect transistors with re-grown AlGaN/GaN two-dimensional electron gas channels on GaN substrates. Appl Phys Express 3(5):054201
Diduck Q, Nie H, Alvarez B, Edwards A, Bour D, Aktas O, Disney D, Kizilyalli IC (2013) 1000 V vertical JFET using bulk GaN. ECS Trans 58(4):295–298
Oka T, Ueno Y, Ina T, Hasegawa K (2014) Vertical GaN-based trench metal oxide semiconductor field-effect transistors on a free-standing GaN substrate with blocking voltage of 1.6 kV. Appl Phys Express 7(2):021002
Yeluri R, Lu J, Hurni CA, Browne DA, Chowdhury S, Keller S, Speck JS, Mishra UK (2015) Design, fabrication, and performance analysis of GaN vertical electron transistors with a buried p/n junction. Appl Phys Lett 106(18):183502
Ueda T, Tanaka T, Ueda D (2007) Gate injection transistor (GIT)-A normally-off AlGaN/GaN power transistor using conductivity modulation. IEEE Trans Electron Devices 54(12):3393–3399
Kanamura M, Ohki T, Kikkawa T, Imanishi K, Imada T, Yamada A, Hara N (2010) Enhancement-mode GaN MIS-HEMTs with n-GaN/i-AlN/n-GaN triple cap layer and high-k gate dielectrics. IEEE Electron Device Lett 31(3):189–191
Cai Y, Zhou Y, Chen KJ, Lau KM (2005) High-performance enhancement-mode AlGaN/GaN HEMTs using fluoride-based plasma treatment. IEEE Electron Device Lett 26(7):435–437
Niiyama Y, Kambayashi H, Ootomo S, Nomura ST, Yoshida S, Chow TP (2008) Over 2 A operation at 250 °C of GaN metal-oxide semiconductor field effect transistors on sapphire substrates. Jpn J Appl Phys 47(9):7128–7130
Kanechika M, Uesugi T, Kachi T (2010) Advanced SiC and GaN power electronics for automotive systems. In: 2010 international electron devices meeting
Kruszewski P, Jasinski J, Sochacki T, Bockowski M, Jachymek R, Prystawko P, Zajac M, Kucharski R, Leszczynski M (2014) Vertical schottky diodes grown on low-dislocation density bulk GaN substrate. The international workshop on nitride semiconductor
Ji D, Chowdhury S (2015) Design of 1.2 kV power switches with low RON using GaN-based vertical JFET. IEEE Trans Electron Devices 62(8):2571–2578
Chowdhury S (2010) PhD Thesis. AlGaN/GaN CAVETs for high power switching application
Anderson T, Kub F, Eddy C, Hite J, Feigelson B, Mastro M, Hobart K, Tadjer M (2014) Activation of Mg implanted in GaN by multicycle rapid thermal annealing. Electron Lett 50(3):197–198
Ben Yaacov I (2004) PhD Thesis. AlGaN/GaN current aperture vertical electron transistor
Kachi T (2014) Recent progress of GaN power devices for automotive applications. Jpn J Appl Phys 53(10):100210
Acknowledgments
The author would like to acknowledge Prof. Umesh Mishra, Drs. Brian Swenson and Man hoi Wong and Dong Ji for their technical contributions at various levels to this work.
The author would also like to thank Toyota Motor Corporation, Japan (Dr. Tetsu Kachi, Dr. Masahiro Sugimoto and Dr. Tsutomu Uesugi), and ARPA-E (Dr. Timothy Heidel, Dr. Pawel Gradzki, Dr. Eric Carlson and Dr. Daniel Cunningham) for supporting the vertical GaN device development.
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Chowdhury, S. (2017). Vertical Gallium Nitride Technology. In: Meneghini, M., Meneghesso, G., Zanoni, E. (eds) Power GaN Devices. Power Electronics and Power Systems. Springer, Cham. https://doi.org/10.1007/978-3-319-43199-4_5
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DOI: https://doi.org/10.1007/978-3-319-43199-4_5
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