Modeling and Testing of a Novel Decoupled XY Nano-positioning Stage
This paper reports the modeling and experimental testing of a novel XY flexure-based nano-positioning stage. The stage is driven by two piezoelectric actuators, and a novel compound decoupling-guiding mechanism is designed. The mechanism mainly features with the series connection of separated prismatic join and parallelogram, which reduces the parasitic displacement of the actuator and guides the motion of end-effector. A compound bridge type amplifier and centrosymmetric mechanism are adopted to obtain decoupled large range motion. A kinematics model using the compliance matrix method is established to describe the characteristics of stage. Finite element analysis is also conducted to evaluate the performance of the nano-positioning stage. A prototype of the stage has been fabricated by the wire electro discharge machining method. Experimental verification is further carried out, the results demonstrate that the proposed stage has a working stroke of 40.2 × 42.9 μm2 corresponding to the applied voltage of 100 V, and it has a cross-axis coupling ratio of 0.6% and an input coupling ratio of 3.5%.
KeywordsNano-positioning stage Decoupling-guiding mechanism Kinematics model Flexure-based mechanism
This research was supported by National Key R&D Program of China (nos. 2017YFB1104700, 2017YFE0112100, and 2016YFE0112100), National Natural Science Foundation of China (Grant nos. 51675376, 51675371 and 51675367), Science & Technology Commission of Tianjin Municipality (Grant no. 18PTZWHZ00160), China-EU H2020 MNR4SCell (no. 734174).
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