Abstract
This paper reports the modeling and experimental testing of a novel XY flexure-based nano-positioning stage. The stage is driven by two piezoelectric actuators, and a novel compound decoupling-guiding mechanism is designed. The mechanism mainly features with the series connection of separated prismatic join and parallelogram, which reduces the parasitic displacement of the actuator and guides the motion of end-effector. A compound bridge type amplifier and centrosymmetric mechanism are adopted to obtain decoupled large range motion. A kinematics model using the compliance matrix method is established to describe the characteristics of stage. Finite element analysis is also conducted to evaluate the performance of the nano-positioning stage. A prototype of the stage has been fabricated by the wire electro discharge machining method. Experimental verification is further carried out, the results demonstrate that the proposed stage has a working stroke of 40.2 × 42.9 μm2 corresponding to the applied voltage of 100 V, and it has a cross-axis coupling ratio of 0.6% and an input coupling ratio of 3.5%.
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References
Park, K., et al.: Measurement of adherent cell mass and growth. Proc. Natl. Acad. Sci. U.S.A. 107(48), 20691–20696 (2010)
Efimov, A., et al.: A novel design of a scanning probe microscope integrated with an ultramicrotome for serial block-face nanotomography. Rev. Sci. Instrum. 88(2), 023701 (2017)
Dai, G., Pohlenz, F., Danzebrink, H.: Metrological large range scanning probe microscope. Rev. Sci. Instrum. 75(4), 962 (2004)
Guo, Z., et al.: Probe system design for three-dimensional micro/nano scratching machine. Microsyst. Technol. 23(6), 2285–2295 (2017)
Tseng, A., Kuo, C., Jou, S.: Scratch direction and threshold force in nanoscale scratching using atomic force microscopes. Appl. Surf. Sci. 257(22), 9243–9250 (2011)
Wang, F., et al.: A novel actuator-internal micro/nano positioning stage with an arch-shape bridge type amplifier. IEEE Trans. Ind. Electron. https://doi.org/10.1109/tie.2018.2885716
Liang, C., Wang, F., Tian, Y., Zhao, X., Zhang, D.: Development of a high speed and precision wire clamp with both position and force regulations. Robot. Com. Int. Manuf. 44, 208–217 (2017)
Kenton, B., Leang, K.: Design and control of a three-axis serial-kinematic high-bandwidth nanopositioner. IEEE/ASME Trans. Mech. 17(2), 356–369 (2012)
Yong, Y., Aphale, S., Moheimani, S.: Design, identification, and control of a flexure-based XY Stage for fast nanoscale positioning. IEEE Trans. Nanotechnol. 8(1), 46–54 (2009)
Li, Y., Xu, Q.: Design and analysis of a totally decoupled flexure-based XY parallel micromanipulator. IEEE Trans. Robot. 25(3), 645–657 (2009)
Wang, H., Zhang, X.: Input coupling analysis and optimal design of a 3-DOF compliant micro-positioning stage. Mech. Mach. Theory 43(4), 400–410 (2008)
Wang, F., Liang, C., Tian, Y., Zhao, X., Zhang, D.: Design and control of a compliant microgripper with a large amplification ratio for high-speed micro manipulation. IEEE/ASME Trans. Mech. 21(3), 262–1271 (2016)
Tian, Y., Shirinzadeh, B., Zhang, D., Alici, G.: Development and dynamic modelling of a flexure-based Scott-Russell mechanism for nano-manipulation. Mech. Syst. Signal Process. 23(3), 957–978 (2009)
Wang, F., Liang, C., Tian, Y., Zhao, X., Zhang, D.: Design of a piezoelectric-actuated microgripper with a three-stage flexure-based amplification. IEEE/ASME Trans. Mech. 20(5), 2205–2213 (2015)
Li, Y., Xu, Q.: A novel piezoactuated XY stage with parallel, decoupled, and stacked flexure structure for micro-/nanopositioning. IEEE Trans. Ind. Electron. 58(8), 3601–3615 (2011)
Acknowledgments
This research was supported by National Key R&D Program of China (nos. 2017YFB1104700, 2017YFE0112100, and 2016YFE0112100), National Natural Science Foundation of China (Grant nos. 51675376, 51675371 and 51675367), Science & Technology Commission of Tianjin Municipality (Grant no. 18PTZWHZ00160), China-EU H2020 MNR4SCell (no. 734174).
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Wang, F., Zhao, X., Huo, Z., Tian, Y., Ma, Y., Zhang, D. (2019). Modeling and Testing of a Novel Decoupled XY Nano-positioning Stage. In: Yu, H., Liu, J., Liu, L., Ju, Z., Liu, Y., Zhou, D. (eds) Intelligent Robotics and Applications. ICIRA 2019. Lecture Notes in Computer Science(), vol 11741. Springer, Cham. https://doi.org/10.1007/978-3-030-27532-7_25
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DOI: https://doi.org/10.1007/978-3-030-27532-7_25
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