Microanalysis with Ionization-Loss Electrons

Abstract

In the previous two chapters we’ve described how to acquire an energy-loss spectrum and have also given you some idea of the information in such spectra. Most importantly, there are elemental composition data which can be extracted primarily from the high-loss ionization edges. In this chapter we’ll examine how to get this information and quantify it. As we’ve already indicated, the prime use for these kind of data is light-element microanalysis, where EELS complements XEDS. First we’ll remind you of the experimental variables over which you have control, because these are rather critical. Then we’ll discuss how to obtain a spectrum and what it should look like for microanalysis. Next, we’ll discuss the various quantification routines which, in principle, are just as straightforward as those for XEDS but in practice require a rather more sophisticated level of knowledge to carry them out successfully. Finally, we’ll say a bit about spatial resolution and minimum detectability, although these topics aren’t as important in EELS as they are in XEDS.