Abstract
It is a waste of time to proceed with quantitative microanalysis from your XEDS spectrum without first carrying out qualitative analysis. First we will show you how to choose the best operating conditions, for both the microscope and the XEDS system. Then we will explain the best way to obtain a spectrum for qualitative analysis. Qualitative analysis requires that every peak in your spectrum be identified unambiguously, and with statistical certainty, otherwise it should be ignored. So you have to acquire a spectrum with sufficient X-ray counts to allow you to draw the right conclusions with confidence. There are a couple of simple rules to follow which allow you to do this.
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References
General References
Goldstein, J.I., Newbury, D.E., Echlin, P., Joy, D.C., Romig, A.D. Jr., Lyman, C.E., Fiori, C.E., and Lifshin, E. (1992) Scanning Electron Microscopy and X-ray Microanalysis, 2nd edition, p. 341, Plenum Press, New York.
Russ, J.C. (1984) Fundamentals of Energy Dispersive X-Ray Analysis, Butterworths, Boston.
Specific References
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Liebhafsky, H.A., Pfeiffer, H.G., Winslow, E.H., and Zemany, P.D. (1972) X-rays, Electrons and Analytical Chemistry, p. 349, John Wiley and Sons, New York.
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© 1996 Springer Science+Business Media New York
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Williams, D.B., Carter, C.B. (1996). Qualitative X-ray Analysis. In: Transmission Electron Microscopy. Springer, Boston, MA. https://doi.org/10.1007/978-1-4757-2519-3_34
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DOI: https://doi.org/10.1007/978-1-4757-2519-3_34
Publisher Name: Springer, Boston, MA
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