Abstract
Theoretical considerations concerned with lateral spread of implanted ions are briefly discussed by use of 2nd order differential equations derived from the theory of Lindhard et al. And, the lateral spread is observed experimentally by a backscattering technique. The experimental results are in good agreement with the theoretical considerations. It is concluded that the lateral spread of implanted ions can not be neglected.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
Similar content being viewed by others
References
S. Furukawa, H. Matsumura, and H. Ishiwara, Japan. J. appl. Phys. 11, 134 (1972)
J. Lindhard, M. Scharff, and H.E. Schlott, K. Danske Vidensk. Selsk. mat-fys. Medd. 33, no. 14 (1963)
Y. Akasaka, K. Horie, and S. Kawazu, Appl. Phys. Letters, 21, 128 (1972)
H. E. Schlott, K. Danske Vidensk. Selsk. mat-fys. Medd. 35, no.9 (1966)
F. H. Eisen, B. Welch, J. E. Westmoreland, and J. W. Mayer, Proc. Int. Conf. Atomic Collision Phenomena in Solids, University of Sussex, (1969)p.111.
T. E. Seidel, Proc. 2nd. Int. Conf. on Ion Implantation, edited by I. Ruge and J. Graul, (1971)p.47
D. A. Thompson and W. D. Mackintosh, J. Appl. Phys. 42, 3969 (1971)
F. H. Eisen, G. J. Clark, J. Bottiger, and J. M. Poate, Rad. Effect, 13, 93 (1972)
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1973 Plenum Press, New York
About this chapter
Cite this chapter
Furukawa, S., Matsumura, H. (1973). Theoretical and Experimental Studies on Lateral Spread of Implanted Ions. In: Crowder, B.L. (eds) Ion Implantation in Semiconductors and Other Materials. The IBM Research Symposia Series. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-2064-7_17
Download citation
DOI: https://doi.org/10.1007/978-1-4684-2064-7_17
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4684-2066-1
Online ISBN: 978-1-4684-2064-7
eBook Packages: Springer Book Archive