Detection of Particles Down to a “Few” Micrometers on Non-Specular Microelectronic Substrates and Other Surfaces

Abstract

Detection of contamination “where it falls” whether it be on substrates, work surfaces or in tools, can challenge ones ingenuity. The emphasis in this paper is on practical techniques which have been useful for contamination measurement in a substrate production environment. Grazing angle light (dark field) techniques are used in the detection of particles on non-specular surfaces. These techniques are useful on particles down to a few micrometers, depending on the surface roughness and topology.