Abstract
In the introductory survey presented in Chapter 1, we learned that the SEM image is constructed by scanning a finely focused probe in a regular pattern (the scan raster) across the specimen surface. The spatial resolution achieved in this imaging process is ultimately limited by the size and shape of the focused probe that strikes the specimen. In Chapter 2 we learned how to control the critical parameters of the electron beam, energy, diameter, current, and divergence, through the use of electrical fields in the gun, magnetic fields in the lenses and stigmators, and beam-defining apertures. We saw how, depending on the type of electron source (tungsten hairpin, lanthanum hexaboride, thermal field emission, or cold field emission) and its inherent brightness (a constant dependent upon the beam energy that has been selected), it is possible to create focused beams with sizes ranging from nanometers to micrometers (three orders of magnitude) carrying currents ranging from picoamperes to microamperes (six orders of magnitude). This great flexibility in operational conditions permits the SEM microscopist/microanalyst to successfully attack a wide range of problems, provided that the proper strategy is employed. The strategy needed for selecting the proper operating conditions depends critically upon understanding (1) what happens when the beam reaches the specimen and (2) how the signals produced by the electron beam–specimen interactions are converted into images and/or spectra that convey useful information.
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References
Arnal, F., P. Verdier, and P.-D. Vincinsini (1969). C. R. Acad. Sci. Paris 268, 1526.
Berger, M. (1963). In Methods in Computational Physics, Vol. 1 (B. Adler, S. Fernback, and M. Rotenberg, eds.), Academic Press, New York, p.□□□.
Berger, M. J., and S. M. Seltzer (1964). In Penetration of charged Particles in Matter (U. Fano, ed.), National Academy of Sciences-National Research Council Publication 1133, Washington, D.C., p. 205.
Bethe, H. (1930). Ann. Phys. (Leipzig) 5, 325.
Bishop, H. (1966). In Proceedings of the 4th International Conference on X-ray Optics and Microanalysis (R. Castaing, P. Deschamps, and J. Philibert, eds.), Hermann, Paris, p. 153.
Bruining, H. (1954). Physics and Application of the Secondary Electron Process, Pergamon, London.
Cailler, M., and J.-P. Ganachaud (1990a). Scanning Microsc. Suppl. 4, 57.
Cailler, M., and J.-P. Ganachaud, (1990b). Scanning Microsc. Suppl. 4, 81.
Drescher, H., L. Reimer, and H. Seidel (1970). Z. Agnew, Phys. 29, 33.
Everhart, T. E., R. F. Herzog, M. S. Chang, and W. J. DeVore (1972). In Proceedings of the 6th International Conference on X-ray Optics and Microanalysis (G. Shinoda, K. Kohra, and T. Ichinokawa, eds.), University of Tokyo Press, Tokyo, p. 81.
Heinrich, K. F. J. (1966). In Proceedings of the 4th International Conference on X-ray Optics and Microanalysis (R. Castaing, P. Deschamps, and J. Philibert, eds.), Hermann, Paris, p. 159.
Heinrich, K. F. J., and D. E. Newbury, eds. (1991). Electron Probe Quantitation, Plenum Press, New York.
Heinrich, K. F. J., D. E. Newbury, and H. Yakowitz, eds. (1976). Use of Monte Carlo Calculations in Electron Probe Microanalysis and Scanning Electron Microscopy, National Bureau of Standards Special Publication 460, U.S. Government Printing Office, Washington, D.C.
Henoc, J., and F. Maurice (1991). In Electron Probe Quantitation (K. F. J. Heinrich and D. E. Newbury, eds.), Plenum Press, New York, p. 105.
Hovington, P., D. Drouin, and R. Gauvin (1997). Scanning, 19, 1.
Hunger, H.-J., and L. Kuchler, (1979). Phys. Stat. Sol. a 56, K45.
Joy, D. C. (1987). J. Microsc. 147, 51.
Joy, D. C. (1991). J. Microsc. 161, 343.
Joy, D. C., and S. Luo (1989). Scanning 11, 176.
Kanaya, K., and S. Okayama (1972). J. Phys. D. Appl. Phys. 5, 43.
Kanter, H. (1961). Phys. Rev. 121, 677.
Koshikawa, T. , and R. Shimizu (1974). J. Phys. D Appl. Phys. 7, 1303.
Krause, S. J., W. W. Adams, S. Kumar, T. Reilly, and T. Suziki (1987). In Proceedings EMSA Conference (G. W. Bailey, ed.), San Francisco Press, San Francisco, p. 466.
Murata, K. (1973). SEM/1973, IIT Research Institute, Chicago, p. 268.
Murata, K. (1974). J. Appl. Phys. 45, 4110.
Newbury, D. E., and R. L. Myklebust (1979). Ultramicroscopy 3, 391.
Newbury, D. E., and R. L. Myklebust (1984). In Electron Beam Interactions with Solids D. F. Kyser, R. Shimizu, and D. E. Newbury, eds.), SEM, Inc., Chicago, p. 153.
Newbury, D. E., and R. L. Myklebust, in Microbeam Analysis (D. G. Howitt, ed.), San Francisco Press, San Francisco, p. 561.
Newbury, D. E., H. Yakowitz, and R. L. Myklebust (1973). Appl. Phys. Lett. 23, 488.
Newbury, D. E., D. C. Joy, P. Echlin, C. E. Fiori, and J. I. Goldstein (1986). Advanced Scanning Electron Microscopy and X-ray Microanalysis, Plenum Press, New York.
Niedrig, H. (1978). Scanning 1, 17.
Rao-Sahib, T. S., and D. B. Wittry (1972). In Proceedings of the 6th International Congress on X-ray Optics and Microanalysis, (G. Shinoda, K. Kohra, and T. Ichinokawa, eds.), University of Tokyo Press, Tokyo, p. 131.
Reimer, L., and C. Tollkamp, (1980). Scanning 3, 35.
Reuter, W. (1972). In Proc. 6th Int’l Cong. on X-ray Optics and Microanalysis (G. Shinoda, K. Kohra, and T. Ichinokawa, eds.), Univ. Tokyo Press, Tokyo, p. 121.
Seiler, H. (1967). Z. Angew. Phys. 22, 249.
Seiler, H. (1983). J. Appl. Phys. 54, R1.
Seiler, H. (1984). In Proceedings of the 1st Pfefferkorn Conference (D. Kyser, H. Nedrig, R. Shimizu, and D. Newbury, eds.) Scanning Microscopy, Inc., Chicago, p. 33.
Shimizu, R., and K. Murata (1971). J. Appl. Phys. 42, 387.
Streitwolf, H. W. (1959). Ann. Phys. (Leipzig) 3, 183.
Vaz, O. W. (1986). Ph.D. Thesis, Arizona State University, Tempe, Arizona.
Vaz, O. W., and S. J. Krause (1986). In Proceedings EMSA Conference (G. W. Bailey, ed.), San Francisco Press, San Francisco, p. 676.
Wells, O. C. (1974). Scanning Electron Microscopy, McGraw-Hill, New York.
Wittry, D. B. (1966). In Proceedings of the 4th International Conference on X-ray Optics and Microanalysis, (R. Castaing, P. Deschamps, and J. Philibert, eds.), Hermann, Paris, p. 168.
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Goldstein, J.I. et al. (2003). Electron Beam–Specimen Interactions. In: Scanning Electron Microscopy and X-ray Microanalysis. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-0215-9_3
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DOI: https://doi.org/10.1007/978-1-4615-0215-9_3
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