Scanning Electron Microscopy and X-Ray Microanalysis

1. Front Matter

   Pages i-xix

   PDF

2. Introduction

   • Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.

   Pages 1-20

3. The SEM and Its Modes of Operation

   • Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.

   Pages 21-60

4. Electron Beam–Specimen Interactions

   • Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.

   Pages 61-98

5. Image Formation and Interpretation

   • Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.

   Pages 99-193

6. Special Topics in Scanning Electron Microscopy

   • Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.

   Pages 195-270

7. Generation of X-Rays in the SEM Specimen

   • Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.

   Pages 271-296

8. X-Ray Spectral Measurement: EDS and WDS

   • Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.

   Pages 297-353

9. Qualitative X-Ray Analysis

   • Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.

   Pages 355-390

10. Quantitative X-Ray Analysis: The Basics

    • Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.

    Pages 391-451

11. Special Topics in Electron Beam X-Ray Microanalysis

    • Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.

    Pages 453-536

12. Specimen Preparation of Hard Materials: Metals, Ceramics, Rocks, Minerals, Microelectronic and Packaged Devices, Particles, and Fibers

    • Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.

    Pages 537-564

13. Specimen Preparation of Polymer Materials

    • Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.

    Pages 565-590

14. Ambient-Temperature Specimen Preparation of Biological Material

    • Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.

    Pages 591-619

15. Low-Temperature Specimen Preparation

    • Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.

    Pages 621-645

16. Procedures for Elimination of Charging in Nonconducting Specimens

    • Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.

    Pages 647-673

17. Back Matter

    Pages 675-690

    PDF

In the decade since the publication of the second edition of Scanning Electron Microscopy and X-Ray Microanalysis, there has been a great expansion in the capabilities of the basic scanning electron microscope (SEM) and the x-ray spectrometers. The emergence of the variab- pressure/environmental SEM has enabled the observation of samples c- taining water or other liquids or vapor and has allowed for an entirely new class of dynamic experiments, that of direct observation of che- cal reactions in situ. Critical advances in electron detector technology and computer-aided analysis have enabled structural (crystallographic) analysis of specimens at the micrometer scale through electron backscatter diffr- tion (EBSD). Low-voltage operation below 5 kV has improved x-ray spatial resolution by more than an order of magnitude and provided an effective route to minimizing sample charging. High-resolution imaging has cont- ued to develop with a more thorough understanding of how secondary el- trons are generated. The ?eld emission gun SEM, with its high brightness, advanced electron optics, which minimizes lens aberrations to yield an - fective nanometer-scale beam, and “through-the-lens” detector to enhance the measurement of primary-beam-excited secondary electrons, has made high-resolution imaging the rule rather than the exception. Methods of x-ray analysis have evolved allowing for better measurement of specimens with complex morphology: multiple thin layers of different compositions, and rough specimens and particles. Digital mapping has transformed classic x-ray area scanning, a purely qualitative technique, into fully quantitative compositional mapping.

• Apertur
• Filter
• Helium-Atom-Streuung
• STEM
• ceramics
• coating
• diffraction
• electron diffraction
• electron microscope
• electron microscopy
• liquid
• microscopy
• optics
• scanning electron microscope
• structural analysis
• Biological Microscopy

“There is no other single volume that covers as much theory and practice of SEM or X-ray microanalysis as Scanning Electron Microscopy and X-ray Microanalysis, 3rd Edition does. It is clearly written ... well organized. ... This is a reference text that no SEM or EPMA laboratory should be without.” (Thomas J. Wilson, Scanning, Vol. 27 (4), July/August, 2005)

“As the authors pointed out, the number of equations in the book is kept to a minimum, and important conceptions are also explained in a qualitative manner. A lot of very distinct images and schematic drawings make for a very interesting book and help readers who study scanning electron microscopy and X-ray microanalysis. The principal application and sample preparation given in this book are suitable for undergraduate students and technicians learning SEEM and EDS/WDS analyses. It is an excellent textbook for graduate students, and an outstanding reference for engineers, physical, and biological scientists.” (Microscopy and Microanalysis, Vol. 9 (5), October, 2003)

• University of Massachusetts, Amherst, USA

  Joseph I. Goldstein

• National Institute of Standards and Technology, Gaithersburg, USA

  Dale E. Newbury

• Cambridge Analytical Microscopy Ltd., Cambridge, England

  Patrick Echlin

• University of Tennessee, Knoxville, USA

  David C. Joy

• Lehigh University, Bethlehem, USA

  Charles E. Lyman

• State University at Albany, Albany, USA

  Eric Lifshin

• Ticona LLC, Summit, USA

  Linda Sawyer

• Sandia National Laboratories, Albuquerque, USA

  Joseph R. Michael

Policies and ethics