Abstract
In this chapter, a review of gate oxide scaling problems, physics, and models in MOSFETs has been done. The modeling approach to gate tunneling used in several industry-standard compact MOS models has been presented. Some special cases of gate oxide tunneling have also been considered in this chapter.
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Notes
- 1.
The text/figures/equations/references, etc., associated with [48] have been republished/reorganized from the paper [48], Amit Chaudhry and Jatindra Nath Roy, “Analytical Modeling of Gate Oxide leakage Tunneling Current in a MOSFET: A Quantum Mechanical Study”, Micro-nano-electronic Technology, Vol. 48, No. 6, pp.357–364, June, 2011 with due permission from the publisher.
- 2.
The text/figures/equations/references, etc., associated with [53] have been republished/reorganized from the paper [53] Amit Chaudhry and Jatinder Nath Roy, “Gate Oxide Leakage in Poly-depleted Nanoscale-MOSFET: A Quantum Mechanical Study”, International Journal of Nanoelectronics and Materials, Vol. 4, No. 2, pp.93–100, 2011 with due permission from the publisher.
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Chaudhry, A. (2013). Nanoscale Effects: Gate Oxide Leakage Currents. In: Fundamentals of Nanoscaled Field Effect Transistors. Springer, New York, NY. https://doi.org/10.1007/978-1-4614-6822-6_2
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DOI: https://doi.org/10.1007/978-1-4614-6822-6_2
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