Nonlinear Phenomena in Microelectromechanical Resonators
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Nonlinear oscillations of clamped-clamped microelectromechanical filters are studied in this effort. Piezoelectric actuation is used to excite these structures on the input side and piezoelectric sensing is carried out on the output side. Experimental observations of nonlinear phenomena are presented and nonlinear analysis being carried out to explain the experimental observations is briefly discussed.
Key wordsClamped-clamped structures piezo actuation MEMS resonators buckling
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