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Nonlinear Phenomena in Microelectromechanical Resonators

  • B. Balachandran
  • H. Li
Conference paper
Part of the Solid Mechanics and its Applications book series (SMIA, volume 122)

Abstract

Nonlinear oscillations of clamped-clamped microelectromechanical filters are studied in this effort. Piezoelectric actuation is used to excite these structures on the input side and piezoelectric sensing is carried out on the output side. Experimental observations of nonlinear phenomena are presented and nonlinear analysis being carried out to explain the experimental observations is briefly discussed.

Key words

Clamped-clamped structures piezo actuation MEMS resonators buckling 

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Copyright information

© Springer 2005

Authors and Affiliations

  • B. Balachandran
    • 1
  • H. Li
    • 1
  1. 1.Department of Mechanical EngineeringUniversity of Maryland College ParkUSA

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