Abstract
Nonlinear oscillations of clamped-clamped microelectromechanical filters are studied in this effort. Piezoelectric actuation is used to excite these structures on the input side and piezoelectric sensing is carried out on the output side. Experimental observations of nonlinear phenomena are presented and nonlinear analysis being carried out to explain the experimental observations is briefly discussed.
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Balachandran, B., Li, H. (2005). Nonlinear Phenomena in Microelectromechanical Resonators. In: Rega, G., Vestroni, F. (eds) IUTAM Symposium on Chaotic Dynamics and Control of Systems and Processes in Mechanics. Solid Mechanics and its Applications, vol 122. Springer, Dordrecht. https://doi.org/10.1007/1-4020-3268-4_9
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DOI: https://doi.org/10.1007/1-4020-3268-4_9
Publisher Name: Springer, Dordrecht
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