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© 2004 Kluwer Academic Publishers
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(2004). Microelectromechnicalsystems-MEMS. In: RF/Microwave Hybrids. Springer, Boston, MA. https://doi.org/10.1007/0-306-48153-7_17
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DOI: https://doi.org/10.1007/0-306-48153-7_17
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