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Ion Beam Bombardment Effects on Solid Surfaces at Energies Used for Sputter Depth Profiling

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Beam Effects, Surface Topography, and Depth Profiling in Surface Analysis

Part of the book series: Methods of Surface Characterization ((MOSC,volume 5))

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References

  1. A. W. Czanderna, in: Ion Spectroscopies for Surface Analysis (A. W. Czanderna and D. M. Hercules, eds.), Plenum Press, New York (1991), pp. 1–44.

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  2. J. A. McHugh, in: Methods of Surface Analysis (A. W. Czanderna, ed.), Elsevier, Amsterdam (1975), pp. 223–278.

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  3. G. K. Wehner, in: Methods of Surface Analysis (A. W. Czanderna, ed.), Elsevier, Amsterdam (1975), pp. 1–37.

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  4. A. W. Czanderna, ed., Methods of Surface Analysis, Elsevier, Amsterdam (1975).

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  5. Y. Z. Hu, K. A. Conrad, M. Li, J. W. Andrews, J. P. Simko, and E. A. Irene, Studies of hydrogen ion beam cleaning of silicon dioxide from silicon using in situ spectroscopic ellipsometry and X-ray photoelectron spectroscopy, Appl. Phys. Lett. 58(6), 589–591 (1991).

    Article  CAS  Google Scholar 

  6. P. Mazzoldi, Ion beam modification of glass surface properties, J. Non-Cryst. Solids 120, 223–233 (1990).

    Article  CAS  Google Scholar 

  7. Z. W. Kowalski, Ion sputtering and its biomedical applications. Theoretical concepts and practical consequences. Clinical implications and potential use, J. Mater. Sci. 20, 1521–1555 (1985).

    Article  CAS  Google Scholar 

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Author notes

  1. J. R. Pitts

    Present address: National Center for Photovoltaics and Center for Basic Sciences, USA

Authors and Affiliations

  1. National Renewable Energy Laboratory, Golden, CO, 80401

    L. S. Dake, D. E. King, J. R. Pitts & A. W. Czanderna

Authors
  1. L. S. Dake
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  2. D. E. King
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  3. J. R. Pitts
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  4. A. W. Czanderna
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Editor information

Editors and Affiliations

  1. National Renewable Energy Laboratory, Golden, Colorado

    Alvin W. Czanderna

  2. Rutgers, The State University of New Jersey, Piscataway, New Jersey

    Theodore E. Madey

  3. National Institute of Standards and Technology, Gaithersburg, Maryland

    Cedric J. Powell

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© 2002 Kluwer Academic Publishers

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Dake, L.S., King, D.E., Pitts, J.R., Czanderna, A.W. (2002). Ion Beam Bombardment Effects on Solid Surfaces at Energies Used for Sputter Depth Profiling. In: Czanderna, A.W., Madey, T.E., Powell, C.J. (eds) Beam Effects, Surface Topography, and Depth Profiling in Surface Analysis. Methods of Surface Characterization, vol 5. Springer, Boston, MA. https://doi.org/10.1007/0-306-46914-6_3

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  • DOI: https://doi.org/10.1007/0-306-46914-6_3

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-0-306-45896-5

  • Online ISBN: 978-0-306-46914-5

  • eBook Packages: Springer Book Archive

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