Photo-sensitivity of large area physical vapor deposited mono and bilayer MoS2
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We present photosensitivity in large area physical vapour deposited mono and bi-layer MoS2 films. Photo-voltaic effect was observed in single layer MoS2 without any apparent rectifying junctions, making device fabrication straightforward. For bi-layers, no such effect was present, suggesting strong size effect in light-matter interaction. The photo-voltaic effect was observed to highly direction dependent in the film plane, which suggests that the oblique deposition configuration plays a key role in developing the rectifying potential gradient. To the best of our knowledge, this is the first report of any large area and transfer free MoS2 photo device with performance comparable to their exfoliated counterparts.
KeywordsMoS2 Monolayer MoS2 Single Layer MoS2 Oblique Deposition Wafer Piece
Atomically thin semiconductor materials with large band gaps are touted for aggressively scaled electronic and optoelectronic applications . Even though graphene does not have a band gap, its advent has galvanized the research on two-dimensional (2D) materials, notably the transition metal di-chalcogenides (TMD) . The best example is molybdenum di-sulfide (MoS2), which has received significant attention in the scientific community due to high carrier mobility, large current on/off ratio and excellent interface quality with the gate dielectrics . Bulk MoS2 has an indirect band gap of 1.2 eV which changes to a direct band gap of 1.83 eV for a monolayer MoS2,. This leads to unprecedented light-matter interaction (high absorption coefficient and efficient electron–hole pair generation under photo-excitation) that has been studied in the form of photoluminescence, photoreponsivity, photoconductivity and photo-voltaics ,-. While the existing literature on mono or few-layer MoS2 opto-electronics promise revolutionary capabilities of next generation devices, all these studies are performed on exfoliated flakes. Since exfoliation is not a sustainable path beyond basic science, there is a critical need for large area growth of mono-layer MoS2 and its opto-electronic characterization. This provides the motivation for the present study, where we deposit large area (> cm2) mono and bi-layer MoS2 through magnetron sputtering and then study the effect of layer number on the interaction of matter and light. Since the deposition is directly performed on the desired substrate, our fabrication processes are performed directly on the specimen. Specimen transfer to another sample is not needed and contamination is avoided. To the best of our knowledge, this is the first report of any large area, transfer free monolayer MoS2 photo-voltaic or photo-detector device with performance comparable to their exfoliated counterparts.
Dark dc resistivity of the mono and bi-layer MoS 2 specimens
1.87 × 10−5 ohm-cm
1.88 × 10−5 ohm-cm
2.98 × 10−5 ohm-cm
2.93 × 10−5 ohm-cm
A remarkable feature of this study is the apparent ohmic nature of the electrical contacts, as shown in Figure 2. Almost all existing photo-detector devices in the literature -,, present Schottky type contact and the choice of electrode work function is very critical in 2D devices to obtain ohmic contacts. Desired features of the contact are (i) small lattice mismatch at the interface (ii) maximized overlap between the density of states (DOS) at both sides of the interface, (iii) large DOS at the Fermi level throughout the interface region to form delocalized states with low effective electron mass in order to efficiently transfer electrons between the metal and the semiconductor, (iv) a minimized potential barrier at the interface to maximize current injection . Our choice of metals for the electrical contacts therefore appears to be satisfying these conditions. While it is expected that the direct band gap will enhance the photon absorption, formation of an electrical bias through predominantly ohmic contact as seen in Figure 2 is unprecedented. One way to view the observed phenomenon could be the negative-photoconductivity (increase in resistivity under photo-excitation) effect. Essentially, the resistivity of the mono and bilayer specimens increased to 3.5 and 1.1 times respectively under illumination. This is contrary to the conventional observation where light induced charge generation actually increases conductivity. This clearly indicates that the generated charge has been isolated and trapped at the electrodes. To achieve negative photo-conductivity, either a hetero-structure to accept and trap the charge - or surface plasmon resonance  is needed. Both these mechanisms may be partially responsible. For example, if the MoS2 specimen is terminated with a Mo layer, it can transport the generated charge to trap it in the oxide substrate of the 2D layers. The obtained experimental results therefore suggest a mechanism for maintaining a potential gradient or asymmetry. While a photo-thermo-electric mechanism has been proposed  to be an alternative for conventional Schottky barriers, this is not the case for our study. To prove this, we have varied the location of the light source (along the plane perpendicular to the distance between the source and specimen) and observed that the maximum photo-voltage occurs when the light source is about 45° angles inclined to the vertical. Since this is not the smallest distance from the specimen, we also do not expect this to provide highest photo-thermal energy.
To explain the anomalous observation of photo-voltaic effect, we closely examine the giant photovoltaic (voltages many times larger than the potential drop across the energy gap) effects in thin semiconducting films. The early literature  indicates occurrence of this intriguing phenomenon in many materials, however the inconsistency in experimental results has contributed to the lack of understanding and technological relevance. Nevertheless, a consistent observation is that an electro-motive potential gradient (the end closer to the source shows negative polarity) is seen in semiconducting thin films when the insulating substrate is inclined with respect to the incident deposition flux. This is exactly same as our deposition configuration as shown in Figure 1a. Interestingly, this specific condition is impossible to achieve in the conventional techniques (exfoliation, chemical vapour deposition). It is hypothesized that the oblique deposition creates nanoscale p-n junctions due to stacking fault, domain boundaries (Figure 1b suggests turbostratic structure of the films) or the Dember effect .
A counter-argument could be that even though the I-V profile is linear and no rectifying junction was intentionally fabricated in the devices, there could be Schottky barriers due to the work function of the Ti electrode  or through the localized doping of the MoS2 (similar to graphene induced doping ). If this were the case, the effect would be the same for all of the four electrodes and there would not be any anisotropic behaviour observed. At the same time, if the fundamental mechanism indeed involves the oblique deposition of the MoS2, we would observe large potential between the ends closest and farthest to the deposition source and minimal potential in the perpendicular direction. To corroborate this hypothesis, we measured the open circuit voltage due to illumination by simply changing the electrical terminals in our van der Pauw structure. It is expected that the end of the specimen closest to the deposition source will have negative while the farthest end will have positive polarity. The two other ends that are equidistant to the deposition source should have the same potential and thus will not show any photo-voltaic effect. Or in other words, the observed photovoltaic effects should be highly anisotropic. As shown in Figure 2c and d, this is indeed the case. This evidence corroborates our hypothesis since the MoS2 layers are not expected to show in-plane electrical anisotropy of such large magnitude. The literature contains evidence of thermal anisotropy in 2D MoS2, where the degree of anisotropy is around 0.8.
In conclusion, we present evidence of photo-voltaic effects in mono and bi-layer ultra-high vacuum magnetron sputtered large area MoS2 specimens in absence of intentionally fabricated p-n junction or Schottky type contact. The photo-responsivity and extrinsic quantum efficiency were estimated to be 0.08 A/W and 0.17 respectively. We also present evidence of potential gradient in oblique deposition of ultrathin semiconducting films and propose that this gradient is instrumental in generating the photo-voltaic effect in ohmic contacts. While most of the MoS2 opto-electronics literature is based on photo-transistors fabricated on exfoliated flakes, the extremely simple design (no need for rectifying junctions) involving large area physical vapour deposited 2D MoS2 presented in this study can significantly impact technology development in this area.
M. A. Haque acknowledges support from the National Science Foundation, USA (ECCS #1028521). C. Muratore and A. Voevodin acknowledge support from the Air Force Office of Scientific Research Thermal Sciences and Low Density Materials Programs. C. Muratore thanks Advanced Energy Industries Inc. for providing the pulsed power supply used for MoS2 growth. Authors are grateful for TEM work by Jianjun Hu (University of Dayton Research Institute) at the Air Force Research Laboratory Materials Directorate.
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