Abstract
The effect of an argon ion beam on the surface of sapphire is studied at different technological parameters: the ion energy, and the angle α between the sapphire surface and the ion-beam axis. The roughness of the sapphire surface is analyzed before and after ion polishing. The optimum ion-beam parameters are determined, at which the surface roughness after polishing decreases to 0.8 nm. At angles α = 20°–30°, the relief of the sapphire surface is found to become wavy. The study of the impact of the ion energy on the roughness of the sapphire surface in the 400–1200-eV range reveals that an increase in the energy of the ion beam to 1200 eV is accompanied with a decrease by 8.8 times in the roughness which falls below the level of 3 nm.
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Original Russian Text © L.S. Lunin, B.M. Sinel’nikov, I.A. Sysoev, 2018, published in Poverkhnost’, 2018, No. 9, pp. 73–77.
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Lunin, L.S., Sinel’nikov, B.M. & Sysoev, I.A. Features of Ion-Beam Polishing of the Surface of Sapphire. J. Surf. Investig. 12, 898–901 (2018). https://doi.org/10.1134/S1027451018050105
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DOI: https://doi.org/10.1134/S1027451018050105