Skip to main content
SpringerLink
Log in

Synthesis and Characterization of Plasma-Polymer Gate Dielectric Films for Graphene Field Effect Transistor Devices

  • Original Article - Electronics, Magnetics and Photonics
  • Published:
Electronic Materials Letters Aims and scope Submit manuscript

A Correction to this article was published on 12 June 2019

This article has been updated

Abstract

In this study, a gate dielectric suitable for application in field effect transistors (FETs) was synthesized. Gate dielectrics were deposited using cyclohexane via plasma-enhanced chemical vapor deposition. These films were synthesized on silicon wafers substrates with plasma powers adjusted from 10 to 60 W. Graphene was synthesized on a nickel substrate by a thermal chemical vapor deposition process and coupled to the plasma-polymer via water transfer. Alpha step, Fourier-transform infrared spectroscopy, Raman spectroscopy, and atomic force microscopy findings in addition to water contact angle measurements were analyzed to characterize the physical and chemical properties of the plasma-polymer thin film. Furthermore, a probe station was used to characterize the FET devices fabricated using such films.

Graphical Abstract

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8

Similar content being viewed by others

Change history

  • 12 June 2019

    The original version of this article unfortunately contains a mistake. Two numbers in the acknowledgement section are incorrect. The correct acknowledgements are as follows:

References

  1. Kim, B.J., Jang, H., Lee, S.-K., Hong, B.H., Ahn, J.-H., Cho, J.H.: High-performance flexible graphene field effect transistors with ion gel gate dielectrics. Nano Lett. 10, 3464–3466 (2010)

    Article  Google Scholar 

  2. Lu, C.-C., Lin, Y.-C., Yeh, C.-H., Huang, J.-C., Chiu, P.-W.: High mobility flexible graphene field-effect transistors with self-healing gate dielectrics. ACS Nano 6, 4469–4474 (2012)

    Article  Google Scholar 

  3. Huang, C.K., Ou, Y.X., Bie, Y.Q., Zhao, Q., Yu, D.P.: Enhanced field emission from large scale uniform monolayer graphene supported by well-aligned ZnO nanowire arrays. Appl. Phys. Lett. 98, 173107 (2011)

    Article  Google Scholar 

  4. Wu, Z.S., Pei, S.F., Ren, W.C., Tang, D.M., Gao, L.B., Liu, B.L., Li, F., Liu, C., Cheng, H.M.: Field emission of single-layer graphene films prepared by electrophoretic deposition. Adv. Mater. 21, 1756–1760 (2009)

    Article  Google Scholar 

  5. Na, Y.E., Han, J.H., Yeo, J.-S.: Approaches to reduce the contact resistance by the formation of covalent contacts in graphene thin film transistors. Appl. Sci. Converg. Technol. 26, 55–61 (2017)

    Article  Google Scholar 

  6. Zhan, B., Li, C., Yang, J., Jenkins, G., Huang, W., Dong, X.: Graphene field-effect transistor and its application for electronic sensing. Small 10, 4042–4065 (2014)

    Article  Google Scholar 

  7. Wang, C., Chen, W., Han, C., Wang, G., Tang, B., Tang, C., Wang, Y., Zou, W., Chen, W., Zhang, X.-A., Qin, S., Chang, S., Wang, L.: Growth of millimeter-size single crystal graphene on cu foils by circumfluence chemical vapor deposition. Sci. Rep. 4, 4537 (2014)

    Article  Google Scholar 

  8. Geim, A.K., Novoselov, K.S.: The rise of grapheme. Nat. Mater. 6, 183 (2007)

    Article  Google Scholar 

  9. Geim, A.K.: Graphene: status and prospects. Science 324, 1530–1534 (2009)

    Article  Google Scholar 

  10. Castro Neto, A.H., Guinea, F., Peres, N.M.R., Novoselov, K.S., Geim, A.K.: The electronic properties of grapheme. Rev. Mod. Phys. 81, 109–162 (2009)

    Article  Google Scholar 

  11. Schwierz, F.: Graphene transistors. Nat. Nanotechnol. 5, 487–496 (2010)

    Article  Google Scholar 

  12. Wang, L., Meric, I., Huang, P.Y., Gao, Q., Gao, Y., Tran, H., Taniguchi, T., Watanabe, K., Campos, L.M., Muller, D.A., Guo, J., Kim, P., Hone, J., Shepard, K.L., Dean, C.R.: One-dimensional electrical contact to a two-dimensional material. Science 342, 614–617 (2013)

    Article  Google Scholar 

  13. Jo, I.S., Kim, Y.S., Moon, J.H., Park, S.B., Moon, J.S., Park, W.B., Lee, J.S., Hong, B.H.: Stable n-type doping of graphene via high-molecular-weight ethylene amines. Phys. Chem. Chem. Phys. 17, 29492–29495 (2015)

    Article  Google Scholar 

  14. Wang, C., Dong, H., Hu, W., Liu, Y., Zhu, D.: Semiconducting π-conjugated systems in field-effect transistors: a material odyssey of organic electronics. Chem. Rev. 112, 2208–2267 (2012)

    Article  Google Scholar 

  15. Silverstein, R.M., Webster, F.X., Kiemle, D.J.: Spectrometric Identification of Organic Compounds. Wiley, New York (2005)

    Google Scholar 

  16. Bae, I.-S., Cho, S.-J., Choi, W.S., Cho, H.J., Hong, B.Y., Jeong, H.-D., Boo, J.-H.: Characterization on polymerized thin films for low-k insulator using PECVD. Prog. Org. Coat. 61, 245–248 (2008)

    Article  Google Scholar 

  17. Ferrari, A.C., Meyer, J.C., Scardaci, V., Casiraghi, C., Lazzeri, M., Mauri, F., Piscanec, S., Jiang, D., Novoselov, K.S., Roth, S., Geim, A.K.: Raman spectrum of graphene and graphene layers. Phys. Rev. Lett. 97, 187401 (2006)

    Article  Google Scholar 

Download references

Acknowledgements

This work was supported by a grant from the National Research Foundation of Korea (NRF) funded by the Korean government (NRF-2017R1D1A1B07051012, NRF-2017R1D1A1B03029848).

Author information

Authors and Affiliations

  1. Department of Chemistry, Sungkyunkwan University, Suwon, 16419, Republic of Korea

    Hyeon Jin Seo, Yeong Eun Gil, Antony Ananth & Jin-Hyo Boo

  2. Institute of Basic Science, Sungkyunkwan University, Suwon, 16419, Republic of Korea

    Hyeon Jin Seo, Ki-Hwan Hwang, Antony Ananth & Jin-Hyo Boo

Authors
  1. Hyeon Jin Seo
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Yeong Eun Gil
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Ki-Hwan Hwang
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Antony Ananth
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Jin-Hyo Boo
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Jin-Hyo Boo.

Additional information

Publisher's Note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Seo, H.J., Gil, Y.E., Hwang, KH. et al. Synthesis and Characterization of Plasma-Polymer Gate Dielectric Films for Graphene Field Effect Transistor Devices. Electron. Mater. Lett. 15, 396–401 (2019). https://doi.org/10.1007/s13391-019-00139-6

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s13391-019-00139-6

Keywords

Search

Navigation