Abstract
Subaperture polishing of silicon aspheric optics using air-inflated membrane tool is reported in the present work. A faster approach for material removal has been applied for local material removal using inflated bonnet polishing tool. Optical quality surface finish on silicon asphere is obtained by applying more pressure and greater velocity on subaperture tool with less distortion on the polishing surface as compared to a larger tool. Further, less tool wear cost makes this process more economical for lower production requirements. The linear feed rate has been optimized to produce optical quality surface finish using less number of iterations. Stylus profilometer and optical profilometer have been used for aspheric surface characterization. The surface accuracy and surface roughness achieved are 127 nm and 1.44 nm, respectively.
Similar content being viewed by others
References
R.E. Parks, Fabrication of infrared optics. Opt. Eng. 33(3), 685–692 (1994)
G. Boothroyd, Handbook of Lapping and Polishing (CRC Press, Taylor & Francis Group, New York, 2007)
B. Braunecker, R. Hentschel, H.J. Tiziani, Advanced Optics Using Aspherical Elements (SPIE eBook, Bellingham, 2008)
N. Pandey, K.K. Pant, S. Mishra, L.M. Pant, A. Ghosh, Pitch Polishing of Semiconductor Optical Materials Using Continuous Iterative Interferrogram Analysis IWPSD-2013, India (Springer, Berlin, 2014), pp. 811–812
T.T. Saito, Diamond turning of optics: the past, the present, and the exciting future. Opt. Eng. 17, 570–573 (1978)
D. Walker, D. Brooks, A. King, R. Freeman, R. Morton, G. McCavana, S. Kim, The precessions tooling for polishing and figuring flat, spherical and aspheric surfaces. Opt. Express 11, 958–964 (2003)
H.M. Martin, D.S. Andersen, J.R.P. Angel, R.H. Nagel, S.C. West, R.S. Young, Progress in the stressed-lap polishing of a 1.8 m f/1 mirror, in Advanced Technology Optical Telescopes IV, ed. L.D. Barr, Proceedings of SPIE, vol 1236 (1990), pp. 682–690
T. Korhonen, T. Lappalainen, Computer controlled figuring and testing, in Advanced Technology Optical Telescopes IV, ed. L. Barr, Proceedings of SPIE, vol 1236 (1990), pp. 691–695
N. Pandey, A. Kumar, K.K. Pant, V. Kumar, A. Ghosh, Sub aperture polishing of Fused Silica aspheric surface using dwell time approach, in IEM OPTRONIX-2014, India, Springer Proceedings in Physics, vol 166, pp. 489–493
V.W. Kordonski, D. Golini, P. Dumas, S.J. Hogan, S.D. Jacobs, in Magnetorheological-Suspension-Based Finishing Technology, ed. J.M. Sater, Proceedings of SPIE, vol 3326 (1998), pp. 527–535
A. Beaucamp, R. Freeman, A. Matsumoto, Y. Namba, Fluid Jet and Bonnet Polishing of Optical Moulds for Applications from Visible to X-Ray, in Proceedings of the 11th Euspen International Conference, Como, May 2011
D. Walker, D. Brooks, R. Freeman, A.M. King, G. McCavana, R. Morton, D. Riley, J. Simms, Firstaspheric form and texture results from a production machine embodying the precessions process, in Optical Manufacturing and Testing IV, Proceedings of SPIE, vol 4451 (2000), pp. 267–276
D. Walker, Use of ‘precession’ TM process for prepolishing and corrective 2D & 2 1/2D form. Opt. Express 14, 11787–11795 (2006)
F.W. Preston, The theory and design of plate glass polishing machines. J. Soc. Glass Tech. 11, 214 (1927)
Acknowledgements
The authors are thankful to Mr. Benjamin Lionel, Director IRDE, Dehradun, for his support and constant encouragement during the course of this work.
Author information
Authors and Affiliations
Corresponding author
Additional information
Publisher's Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
About this article
Cite this article
Ghosh, A., Pandey, N., Pant, K.K. et al. Subaperture polishing of silicon asphere. J Opt 48, 266–271 (2019). https://doi.org/10.1007/s12596-019-00518-0
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s12596-019-00518-0