Abstract
We used atomistic simulation tools to correlate experimental transmission electron microscopy images of extended defects in crystalline silicon with their structures at an atomic level. Reliable atomic configurations of extended defects were generated using classical molecular dynamics simulations. Simulated high-resolution transmission electron microscopy (HRTEM) images of obtained defects were compared to experimental images reported in the literature. We validated the developed procedure with the configurations proposed in the literature for {113} and {111} rod-like defects. We also proposed from our procedure configurations for {111} and {001} dislocation loops with simulated HRTEM images in excellent agreement with experimental images.
Similar content being viewed by others
References
A. Claverie, B. Colombeau, F. Cristiano, A. Altibelli, and C. Bonafos, Nucl. Instrum. Methods Phys. Res. B 186, 281 (2002)
B. de Mauduit, L. Laânab, C. Bergaud, M.M. Faye, A. Martinez, and A. Claverie, Nucl. Instrum. Methods Phys. Res. B 84, 190 (1994)
P.A. Stolk, H.J. Gossmann, D.J. Eaglesham, D.C. Jacobson, C.S. Rafferty, G.H. Gilmer, M. Jaraíz, J.M. Poate, H.S. Luftman, and T.E. Haynes, J. Appl. Phys. 81, 6031 (1997)
S. Takeda, Microsc. Res. Tech. 40, 313 (1998).
L. Fedina, A. Gutakovskii, A. Aseev, J.V. Landuyt, and J. Vanhellemont, Philos. Mag. A 77, 423 (1998).
K.J. Dudeck, L.A. Marqués, A.P. Knights, R.M. Gwilliam, and G.A. Botton, Phys. Rev. Lett. 110, 166102 (2013).
Y. Qiu, F. Cristiano, K. Huet, F. Mazzamuto, G. Fisicaro, A. La Magna, M. Quillec, N. Cherkashin, H. Wang, S. Duguay, and D. Blavette, Nano Lett. 14, 1769 (2014)
A. Claverie and N. Cherkashin, Nucl. Instrum. Methods Phys. Res. B 374, 82 (2016)
L. Pelaz, L.A. Marqués, M. Aboy, P. López, and I. Santos, Eur. Phys. J. B 72, 323 (2009)
M. Aboy, I. Santos, L. Pelaz, L.A. Marqués, and P. López, J. Comput. Electron. 13, 40 (2014)
F. Cristiano, J. Grisolia, B. Colombeau, M. Omri, B. de Mauduit, A. Claverie, L.F. Giles, and N.E.B. Cowern, J. Appl. Phys. 87, 8420 (2000)
F. Cristiano, N. Cherkashin, X. Hebras, P. Calvo, Y. Lamrani, E. Scheid, B. de Mauduit, B. Colombeau, W. Lerch, S. Paul, and A. Claverie, Nucl. Instrum. Methods Phys. Res. B 216, 46 (2004)
S. Takeda, S. Muto, and M. Hirata, Jpn. J. Appl. Phys. 29, L1698 (1990)
S. Takeda, Jpn. J. Appl. Phys. 30, L639 (1991)
G.Z. Pan and K.N. Tu, J. Appl. Phys. 82, 601 (1997)
S. Plimpton, J. Comput. Phys. 117, 1 (1995). http://lammps.sandia.gov
J. Tersoff, Phys. Rev. B 38, 9902 (1988)
L.A. Marqués, L. Pelaz, P. Castrillo, and J. Barbolla, Phys. Rev. B 71, 085204 (2005)
L.A. Marqués, L. Pelaz, I. Santos, P. López, and M. Aboy, Phys. Rev. B 78, 193201 (2008)
L.A. Marqués, M. Aboy, K.J. Dudeck, G.A. Botton, A.P. Knights, and R.M. Gwilliam, J. Appl. Phys. 115, 143514 (2014)
L.A. Marqués, M. Aboy, M. Ruiz, I. Santos, P. López, and L. Pelaz, Mater. Sci. Semicond. Process. 42, 235 (2016)
QSTEM: Quantitative TEM/STEM Simulations. http:// qstem.org
S. Boninelli, N. Cherkashin, A. Claverie, and F. Cristiano, Appl. Phys. Lett. 89, 161904 (2006)
S. Muto and S. Takeda, Philos. Mag. Lett. 72, 99 (1995)
N. Arai, S. Takeda, and M. Kohyama, Phys. Rev. Lett. 78, 4265 (1997)
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Santos, I., Ruiz, M., Aboy, M. et al. Identification of Extended Defect Atomic Configurations in Silicon Through Transmission Electron Microscopy Image Simulation. J. Electron. Mater. 47, 4955–4958 (2018). https://doi.org/10.1007/s11664-018-6140-x
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s11664-018-6140-x