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Micro-/Nano-texturing by Ultrasonic-Assisted Grinding

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Micro and Nano Fabrication Technology

Part of the book series: Micro/Nano Technologies ((MNT))

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Abstract

In this chapter, a novel ultrasonic-assisted micro-/nano-texturing method was proposed and developed. A new 3D ultrasonic vibration spindle was developed for carrying out the proposed processes. The texturing mechanisms were analyzed by mathematically calculating the cutting loci and establishing the surface generation modeling processes. Finally, the tool design principles were proposed and experimentally verified. The experimental results and theoretical analysis proved that the proposed method can rapidly and precisely fabricate tailored surface textures at micrometer and nanometer scales.

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Author information

Authors and Affiliations

  1. Tohoku University, Sendai, Japan

    Masayoshi Mizutani, Keita Shimada & Tsunemoto Kuriyagawa

  2. Southern University of Science and Technology, Shenzhen, Guangdong, China

    Shaolin Xu

  3. Department of Mechanical Systems Engineering, Graduate School of Engineering, Tohoku University, Sendai, Japan

    Masayoshi Mizutani

Authors
  1. Masayoshi Mizutani
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  2. Shaolin Xu
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  3. Keita Shimada
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  4. Tsunemoto Kuriyagawa
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Corresponding author

Correspondence to Masayoshi Mizutani .

Editor information

Editors and Affiliations

  1. Department of Mechanical Engineering, Keio University, Yokohama, Japan

    Jiwang Yan

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Mizutani, M., Xu, S., Shimada, K., Kuriyagawa, T. (2018). Micro-/Nano-texturing by Ultrasonic-Assisted Grinding. In: Yan, J. (eds) Micro and Nano Fabrication Technology. Micro/Nano Technologies. Springer, Singapore. https://doi.org/10.1007/978-981-13-0098-1_8

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