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Catalytic AFM-Based Nanofabrication

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Micro and Nano Fabrication Technology

Part of the book series: Micro/Nano Technologies ((MNT))

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Abstract

Atomic force microscopy (AFM)-based nanolithography and nanostructure fabrication have attracted much attention in recent years in nanoscience and nanotechnology. The AFM-based technique has unique abilities such as precise positioning on the patterned surface to be modified, surface measurements (such as topography, friction force, and phase imaging) after the fabrication process, and localized surface characterization (mechanical, electrical, magnetic, and thermal properties) at the nanometer scale. The approaches developed to date can be divided into subtractive processes (such as direct mechanical modification and thermomechanical writing) and additive ones (such as local anodic oxidation and dip pen nanolithography). Employing a catalytically active AFM probe, a novel nanofabrication strategy has also been used to carry out highly localized catalytic chemical reactions to enable the direct and resistless nanoscale patterning and structuring of various organic/inorganic materials. This chapter focuses on the principles and methods of catalytic AFM-based nanofabrication, challenges in its developments, and the possible solutions.

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Authors and Affiliations

  1. Department of Mechanical Engineering, Toyohashi University of Technology, Toyohashi, Japan

    Takayuki Shibata, Junji Sasano & Moeto Nagai

Authors
  1. Takayuki Shibata
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  2. Junji Sasano
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  3. Moeto Nagai
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Corresponding author

Correspondence to Takayuki Shibata .

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Editors and Affiliations

  1. Department of Mechanical Engineering, Keio University, Yokohama, Japan

    Jiwang Yan

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Shibata, T., Sasano, J., Nagai, M. (2018). Catalytic AFM-Based Nanofabrication. In: Yan, J. (eds) Micro and Nano Fabrication Technology. Micro/Nano Technologies. Springer, Singapore. https://doi.org/10.1007/978-981-13-0098-1_27

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