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Metrology pp 1–33Cite as

Dimensional Metrology Using Mode-Locked Lasers

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Part of the book series: Precision Manufacturing ((PRECISION))

Abstract

Laser-based optical interferometry has long been playing a central role in the progress of dimensional metrology for precision manufacturing. Meanwhile, mode-locked lasers are nowadays available to facilitate the progress by responding to ever-growing industrial demands on the measurement precision and functionality beyond the capabilities of conventional lasers. The optical spectrum of mode-locked lasers, referred to as the frequency comb, acts as the ruler enabling ultra-stable wavelengths to be produced for precision interferometry with traceability to the atomic clock. In addition, mode-locked lasers are employed directly as the light source offering ultrashort pulses, of which the time-of-flight can be detected with unprecedented precision in implementing long distance measurement. Further, mode-locked lasers are able to provide well-controlled temporal coherence in combination with high spatial coherence, being suited to overcome the technical barriers long standing in 3-D profiling of rough surfaces. In summary, mode-locked lasers are now ready to lead the advance of dimensional metrology by providing unique temporal and spectral benefits over conventional continuous wave lasers or broad-spectrum light sources.

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Acknowledgment

This work was supported by the National Research Foundation of the Republic of Korea (NRF-2012R1A3A1050386).

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Authors and Affiliations

  1. Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, South Korea

    Seung-Woo Kim, Yoon-Soo Jang, Jiyong Park & Wooram Kim

Authors
  1. Seung-Woo Kim
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  2. Yoon-Soo Jang
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  3. Jiyong Park
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  4. Wooram Kim
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Corresponding author

Correspondence to Seung-Woo Kim .

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Editors and Affiliations

  1. Department of Nanomechanics, Tohoku University Department of Nanomechanics, Sendai, Miyagi, Japan

    Wei Gao

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Kim, SW., Jang, YS., Park, J., Kim, W. (2019). Dimensional Metrology Using Mode-Locked Lasers. In: Gao, W. (eds) Metrology. Precision Manufacturing. Springer, Singapore. https://doi.org/10.1007/978-981-10-4912-5_1-1

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  • DOI: https://doi.org/10.1007/978-981-10-4912-5_1-1

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  • Publisher Name: Springer, Singapore

  • Print ISBN: 978-981-10-4912-5

  • Online ISBN: 978-981-10-4912-5

  • eBook Packages: Springer Reference EngineeringReference Module Computer Science and Engineering

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