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Piezoelectric Micro/Nano Mechanical Devices for Frequency Control and Chemical Sensing

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Micro Electro Mechanical Systems

Part of the book series: Micro/Nano Technologies ((MNT,volume 2))

Abstract

This chapter reports on the state of the art of piezoelectric micro-/nano-mechanical devices in frequency control and sensing applications. Recent studies on bulk acoustic wave (BAW) devices are introduced, including investigation of high-coupling materials and filter and oscillator designs. A novel class of frequency devices based on Lamb waves is also reviewed. Micro- and nano-mechanical sensors for various sensing applications and integrated module are outlined.

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Authors and Affiliations

  1. State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, 92 Weijin Road, Nankai District, 300072, Tianjin, China

    Wei Pang, Menglun Zhang & Ji Liang

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  1. Wei Pang
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  2. Menglun Zhang
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  3. Ji Liang
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Correspondence to Wei Pang .

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Editors and Affiliations

  1. Southeast University, Nanjing, China

    Qing-An Huang

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Pang, W., Zhang, M., Liang, J. (2017). Piezoelectric Micro/Nano Mechanical Devices for Frequency Control and Chemical Sensing. In: Huang, QA. (eds) Micro Electro Mechanical Systems. Micro/Nano Technologies, vol 2. Springer, Singapore. https://doi.org/10.1007/978-981-10-2798-7_23-1

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  • DOI: https://doi.org/10.1007/978-981-10-2798-7_23-1

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  • Print ISBN: 978-981-10-2798-7

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