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A Micromachined Vibratory Gyroscope

  • Living reference work entry
  • First Online:
Micro Electro Mechanical Systems

Part of the book series: Micro/Nano Technologies ((MNT,volume 2))

  • 309 Accesses

Abstract

MEMS vibratory gyroscopes are widely used in various fields such as consumer electronics, automotive industry, and navigation systems owing to their merits of low power, low cost, and small volume. A MEMS gyroscope is one of the most important inertial devices, which is researched all over the world.

This chapter will introduce a MEMS vibratory gyroscope, aiming to make more people understand what it is and how it works. Firstly, structure design and fabrication, as well as its dynamics theory, are illustrated. Secondly, closed-loop control for the drive mode and mode-matching control are demonstrated. Finally, closed-loop control for the sense mode, followed by temperature compensation method, is presented in detail. In addition, theoretical deduction, simulation, and experimental tests are combined tightly to make the proposed techniques understand easily.

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References

  • Acar C, Shkel AM (2005) Structurally decoupled micromachined gyroscopes with post-release capacitance enhancement. J Micromech Microeng 15:1092–1101

    Article  Google Scholar 

  • Ahn CH, Ng EJ, Hong VA et al (2015) Mode-matching of wineglass mode disk resonator gyroscope in (100) single crystal silicon. J Microelectromech Syst 24(2):343–350

    Article  Google Scholar 

  • Aktakka E E and Najafi K (2016) A six-axis micro platform for in situ calibration of MEMS inertial sensors. Proc MEMS 2016, pp 243–246

    Google Scholar 

  • Askari S, Asadian MH, Kakavand K, Shkel AM (2006) Vacuum sealed and getter activated MEMS Quad Mass Gyroscope demonstrating better than 1.2 million quality factor. 2016 I.E. international symposium on inertial sensors and systems, pp 142–143

    Google Scholar 

  • Askari S, Asadian MH, Kakavand K, Shkel AM (2016) Vacuum sealed and getter activated MEMS Quad Mass Gyroscope demonstrating better than 1.2 million quality factor. 2016 I.E. international symposium on inertial sensors and systems, pp 142–143

    Google Scholar 

  • Cao HL, Li HS, Liu J et al (2016) An improved interface and noise analysis of a turning fork microgyroscope structure. Mech Syst Signal Process 70–71:1209–1220

    Article  Google Scholar 

  • Casinovi G, Norouzpour-Shirazi A, Dalal M, Ayazi F (2016) Gyroscope sensing and self-calibration architecture based on signal phase shift. Sensors Actuators A 241:1–11

    Article  Google Scholar 

  • Chen BD, Liu HZ, Wang HT et al (2011) Thermal shock induced nanocrack as high efficiency surface conduction electron emitter. Appl Surf Sci 257:9125–9128

    Article  Google Scholar 

  • Chen F, Li XX, Kraft M (2016) Electromechanical sigma–delta modulators (ΣΔM) force feedback interfaces for capacitive MEMS inertial sensors: A review. IEEE Sensors J 16(17):6476–6495

    Article  Google Scholar 

  • Cho J, Woo J K, et al. (2013) A high-Q birdbath resonator gyroscope (BRG). Proc Transducers 2013, pp 1847–1850

    Google Scholar 

  • Closkey RTM, Vakakis A, Gutierrez R (2001) Modelocalization induced by a nonlinear control loop. Nonlinear Dyn 3:221–236

    Article  Google Scholar 

  • Cui J, Guo Z Y, Yang Z C, et al. (2011a) Electrical coupling suppressing for a microgyroscope using ascending frequency drive with 2-DOF PID controller. Proc Transducers 2011, pp 2002–2005

    Google Scholar 

  • Cui J, Guo ZY, Yang ZC et al (2011b) Electrical coupling suppression and transient response improvement for a microgyroscope using ascending frequency drive with a 2-DOF PID controller. J Micromech Microeng 21:095020

    Article  Google Scholar 

  • Cui J, He CH et al (2012) Virtual rate-table method for characterization of microgyroscopes. IEEE Sensors J 12:2192–2198

    Article  Google Scholar 

  • Dorf RC, Bishop RH (2005) Modern control system, 10th edn. Science Press, Beijing

    MATH  Google Scholar 

  • Fei JT, Xin MY (2012) An adaptive fuzzy sliding mode controller for MEMS triaxial gyroscope with angular velocity estimation. Nonlinear Dyn 70:97–109

    Article  MathSciNet  Google Scholar 

  • Flader IB, Ahn CH, Ng EJ et al. (2016) Stochastic method for disk resonating gyroscope mode matching and quadrature nulling. Proc MEMS 2016, pp 998–1001

    Google Scholar 

  • Fontanella R, Accardo D, Caricati E et al. (2016) An extensive analysis for the use of back propagation neural networks to perform the calibration of MEMS gyro bias thermal drift. Proc Plans 2016, pp 672–680

    Google Scholar 

  • Franssila S (2004) Introduction to microfabrication. Wiley, New York

    Google Scholar 

  • He CH, Zhao QC, Liu DC et al. (2013a) An automatic real-time mode-matching MEMS gyroscope with fuzzy and neural network control. Proc Transducers 2013, pp 54–57

    Google Scholar 

  • He CH, Zhao QC, Liu YX et al (2013b) Closed loop control design for the sense mode of micromachined vibratory gyroscopes. Sci China Technol Sci 56:1112–1118

    Article  Google Scholar 

  • Lajimi SAM, Heppler GR, Abdel-Rahman EM (2017) A mechanical-thermal noise analysis of a nonlinear microgyroscope. Mech Syst Signal Process 83:163–175

    Article  Google Scholar 

  • Lee A, Ko H et al (2008) Non-ideal behavior of a driving resonator loop in a vibratory capacitive microgyroscope. Microelectron J 39:1–6

    Article  Google Scholar 

  • Li Z, Yang Z, Xiao Z et al (2000) A bulk micromachined vibratory lateral gyroscope fabricated with wafer bonding and deep trench etching. Sensors Actuators A 83:24–29

    Article  Google Scholar 

  • Li J, Broas M, Makkonen J et al (2014) Shock impact reliability and failure analysis of a three-axis MEMS gyroscope. J Microelectromech Syst 23(2):347–355

    Article  Google Scholar 

  • Li J, Mattila T, Vuorinen V (2015) MEMS reliability. Chapter 41 of handbook of silicon based MEMS. Mater Technol 744–763

    Google Scholar 

  • Liu XS, Yang ZC, Yan GZ et al. (2006) Design and fabrication of a lateral axis gyroscope with asymmetric comb-fingers as sensing capacitors. Proc NEMS 2006, pp 762–765

    Google Scholar 

  • Liu DC, He CH, Zhao QC et al (2014) Digital signal processing for a micromachined vibratory gyroscope based on a three dimensional adaptive filter demodulator. Measurement 50:198–202

    Article  Google Scholar 

  • Makkonen J, Broas M, Li J et al. (2012) Reliability assessment of MEMS devices – a case study of a 3 axis gyroscope. Proc ESTC 2012, pp 1–8

    Google Scholar 

  • Pasquale GD, Soma A (2011) MEMS mechanical fatigue: effect of mean stress on gold microbeams. J Microelectromech Syst 20(4):1054–1063

    Article  Google Scholar 

  • Pierron ON, Abnet CC, Muhlstein CL (2006) Methodology for low- and high-cycle fatigue characterization with kHz-frequency resonators. Sensors Actuators A 128:140–150

    Article  Google Scholar 

  • Prikhodko IP, Trusov AA, Shkel AM (2013) Compensation of drifts in high-Q MEMS gyroscopes using temperature self-sensing. Sensors Actuators A 201:517–524

    Article  Google Scholar 

  • Rombach S, Maurer M, Manoli Y (2015) Continuous-time lowpass and bandpass ΔΣ-modulators for closed-loop readout circuits of capacitive MEMS gyroscopes. Inertial Sensors and Systems, pp 7–18

    Google Scholar 

  • Rombach S, Marx M, Nessler S et al (2016) An interface ASIC for MEMS vibratory gyroscopes with a power of 1.6 mW, 92 dB DR and 0.007°/s/√ Hz noise floor over a 40 Hz band. IEEE J Solid State Circuits 51(8):1915–1927

    Article  Google Scholar 

  • Rombacha S, Maurer M, Wendler D, Manoli Y (2015) Implementation of a modulated lowpass ΔΣ-modulator for MEMS gyroscopes with low-power consumption and low sampling. Procedia Eng 120:832–835

    Article  Google Scholar 

  • Senkal D, Askari S, Ahamed MJ et al (2014) 100K Q-factor toroidal ring gyroscope implemented in wafer-level epitaxial silicon encapsulation process. Proc MEMS 2014, pp 24–27

    Google Scholar 

  • Senkal D, Ahamed MJ, Askari S, Shkel AM (2015) Demonstration of 1 million Q-factor on microglassblown wineglass resonators with out-of-plane electrostatic transduction. J Microelectromech Syst 24(1):29–37

    Article  Google Scholar 

  • Shao P, Tavassoli V, Mayberry CL, Ayazi F (2015) A 3D-HARPSS polysilicon microhemispherical shell resonating gyroscope: design, fabrication, and characterization. IEEE Sensors J 15(9):4974–4985

    Article  Google Scholar 

  • Sharma A. (2007) CMOS systems and circuits for sub-degree per hour MEMS gyroscopes. Ph. D., Georgia Institute of Technology

    Google Scholar 

  • Sonmezoglu S, Alper SE, Akin T (2012) An automatically mode-matched MEMS gyroscope with 50Hz bandwidth. Proc. MEMS 2012:523–526

    Google Scholar 

  • Sonmezoglu S, Alper SE, Akin T (2014) An automatically mode-matched MEMS gyroscope with wide and tunable bandwidth. J Microelectromech Syst 23(2):284–297

    Article  Google Scholar 

  • Tatar E (2010) Quadrature error compensation and its effects in the performance of fully decoupled MEMS gyroscope. MS. D., Middle East Technical University

    Google Scholar 

  • Tatar E et al (2012) Quadrature-error compensation and corresponding effects on the performance of fully decoupled MEMS gyroscopes. J Microelectromech Syst 21(3):656–667

    Article  Google Scholar 

  • Torunbalci MM, Alper SE, Akin T (2015) Wafer level hermetic sealing of MEMS devices with vertical feedthroughs using andic bonding. Sensors Actuators A 224:169–176

    Article  Google Scholar 

  • Trusov AA, Prikhodko IP, et al. (2013) 1 PPM precision self-calibration of scale factor in MEMS Coriolis vibratory gyroscopes. Proc Transducers 2013, pp 2531–2534

    Google Scholar 

  • Vafanejad A, Kim ES (2015) Effect of diaphragm perforation on quality factor of hemispherical resonator gyroscope. Proc Transducers 2015, pp 27–30

    Google Scholar 

  • Xiao QJ, Li SY, Chen WY et al (2009) Fuzzy tuning PI control for initial levitation of micromachined electrostatically levitated gyroscope. Electron Lett 45(16):818–819

    Article  Google Scholar 

  • Yan JJ, He CH, Ge F et al (2011) Research of resonant frequency and quality factor test methods for high vacuum sealed microgyroscope based on LabVIEW. Procedia Eng 15:2566–2570

    Article  Google Scholar 

  • Yang C, Li HS (2015) Digital control system for the MEMS tuning fork gyroscope based on synchronous integral demodulator. IEEE Sensors J 15(10):5755–5764

    Article  Google Scholar 

  • Yang C, Li C, Zhang C (2010) The application of RBF neural network in the compensation for temperature drift of the silicon pressure sensor. Proc Int ICCDA’10, Qinhuangdao, 25–27 June 2010, vol 2, pp 434–437

    Google Scholar 

  • Yazdi N, Ayazi F, Najafi K (1998) Micromachined inertial sensors. Proc IEEE 86(8):1640–1659

    Article  Google Scholar 

  • Yole Developpement 2015 (2016) http://www.yole.fr/

  • Zhang QT, Tan ZF, Guo LD (2009) Compensation of temperature drift of MEMS gyroscope using BP neural network. Proc Int ICIECS’09, Wuhan, 19–20 Dec 2009, pp 1–4

    Google Scholar 

  • Zhang JM, He CH, Liu YX et al (2015) A novel scale-factor calibration method for a MEMS gyroscope based on virtual Coriolis force. Proc NEMS 2015, pp 58–62

    Google Scholar 

  • Zihajehzadeh S, Loh D, Lee TJ et al (2015) A cascaded Kalman filter-based GPS_MEMS-IMU integration for sports applications. Measurement 73:200–210

    Article  Google Scholar 

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Authors and Affiliations

  1. National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, 5 Yiheyuan Rd, Haidian, Beijing, 100871, China

    Qiancheng Zhao, Chunhua He, Jian Cui & Guizhen Yan

Authors
  1. Qiancheng Zhao
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  2. Chunhua He
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  3. Jian Cui
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  4. Guizhen Yan
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Corresponding author

Correspondence to Qiancheng Zhao .

Editor information

Editors and Affiliations

  1. Southeast University, Nanjing, China

    Qing-An Huang

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Zhao, Q., He, C., Cui, J., Yan, G. (2018). A Micromachined Vibratory Gyroscope. In: Huang, QA. (eds) Micro Electro Mechanical Systems. Micro/Nano Technologies, vol 2. Springer, Singapore. https://doi.org/10.1007/978-981-10-2798-7_12-1

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  • DOI: https://doi.org/10.1007/978-981-10-2798-7_12-1

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  • Print ISBN: 978-981-10-2798-7

  • Online ISBN: 978-981-10-2798-7

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