Fig. 5

Schematic of cracking-pressure controlled parylene check valve using the residual tensile stress in parylene after thermal annealing (© 2010 IEEE. Reprinted, with permission, from Cracking Pressure Control of Parylene Check Valve Using Slanted Tensile Tethers by J. Lin, F. Yu, Y.-C. Tai, in Tech. Digest 23rd IEEE International Conference on MicroElectroMechanical Systems, Jan. 24–28, 2010)