Encyclopedia of Membranes

2016 Edition
| Editors: Enrico Drioli, Lidietta Giorno

FIB-SEM Tomography

  • Gonzalo Prieto
Reference work entry
DOI: https://doi.org/10.1007/978-3-662-44324-8_2211

FIB-SEM tomography (also known as tomographic FIB-SEM) is a micrometer-to-nanometer scale imaging technique which combines a focused ion beam (FIB) (Yao 2007) with a scanning electron microscope (SEM) (Goldstein et al. 2003) to obtain information on the internal structure of solid specimens. Focused ion beams were developed in the early 1970s as a tool to either etch or deposit material on solids with (sub-)micrometer precision, via either volatilization or deposition processes, respectively, assisted by a beam of ions. They soon became an essential micromachining tool in the semiconductor industry. Later, the FIB technology was integrated into SEM devices. Such combination enables direct imaging of those solid surfaces previously processed with the FIB via detection of either backscattered or secondary electrons. A FIB-SEM device comprises a built-in FIB gun and a SEM detector, typically oriented forming an angle of 52–55°. Advances in FIB resolution and automation have paved the way...

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Copyright information

© Springer-Verlag Berlin Heidelberg 2016

Authors and Affiliations

  1. 1.Max-Planck-Institut für KohlenforschungMülheim an der RuhrGermany