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Handbuch Vakuumtechnik pp 1–22Cite as

Kalibrierung von Vakuummessgeräten

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Zusammenfassung

Kalibrierungen ermitteln den Unterschied der Anzeige eines Messgeräts zum wahren Wert der physikalischen Messgröße. Vakuummessgeräte werden üblicherweise im Vergleichsverfahren mit Bezugsnormalen kalibriert. Diese müssen auf Primärnormale zurückgeführt sein, das heisst, es muss eine ununterbrochene Kalibrierungen zu Primärnormalen bestehen. Die Besonderheiten der Kalibrierungen von Vakuummessgeräten werden beschrieben.

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Notes

  1. 1.

    Die Temperaturerhöhung hängt vor allem von der Heizleistung der Kathode und von der Art des Gehäusekörpers ab und kann 30 K betragen, bei einer Glashülle auch 40 K [10]. Es gibt Hinweise, dass die Temperatur der Gasmoleküle im Ionisationsvakuummeter sehr viel höher ist [10].

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Authors and Affiliations

  1. Physikalisch-Technische Bundesanstalt (PTB), Abbestr. 2-12, 10587, Berlin, Deutschland

    Karl Jousten

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  1. Karl Jousten
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Correspondence to Karl Jousten .

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  1. Berlin, Berlin, Germany

    Karl Jousten

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Jousten, K. (2017). Kalibrierung von Vakuummessgeräten. In: Jousten, K. (eds) Handbuch Vakuumtechnik. Springer Reference Technik . Springer Vieweg, Wiesbaden. https://doi.org/10.1007/978-3-658-13403-7_31-1

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  • DOI: https://doi.org/10.1007/978-3-658-13403-7_31-1

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