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Handbuch Vakuumtechnik pp 1–40Cite as

Ionisationsvakuummeter

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Zusammenfassung

In Ionisationsvakuummetern werden die neutralen Gasteilchen ionisiert und der entstehende Ionenstrom gemessen. Die Ionisierung erfolgt entweder in einem Plasma oder durch einen Elektronenstrahl. Ionisationsvakuummeter messen sehr empfindlich die Gasdichte und sind daher als Messgerät für das Ultrahochvakuum geeignet.

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Authors and Affiliations

  1. Physikalisch-Technische Bundesanstalt (PTB), Abbestr. 2-12, 10587, Berlin, Deutschland

    Karl Jousten

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  1. Karl Jousten
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Correspondence to Karl Jousten .

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  1. Berlin, Berlin, Germany

    Karl Jousten

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Jousten, K. (2017). Ionisationsvakuummeter. In: Jousten, K. (eds) Handbuch Vakuumtechnik. Springer Reference Technik . Springer Vieweg, Wiesbaden. https://doi.org/10.1007/978-3-658-13403-7_27-1

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  • DOI: https://doi.org/10.1007/978-3-658-13403-7_27-1

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