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Handbuch Vakuumtechnik pp 1–41Cite as

Passive Sorptionspumpen

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Zusammenfassung

In diesem Kapitel werden die Pumpweise und Kenndaten von Adsorptionspumpen, Titansublimationspumpen, Getterpumpen und NEG-Pumpen beschrieben. Diese Pumpen gehören zu den sogennnaten passiven Sorptionspumpen, bei denen die auf sie auftreffenden Gasteilchen durch Physi- oder Chemisorption gebunden werden. Bei Volumengetter wird zusätzlich der Effekt der Diffusion in das Absorbermaterial genutzt.

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Author information

Authors and Affiliations

  1. Physikalisch-Technische Bundesanstalt (PTB), Abbestr. 2-12, 10587, Berlin, Deutschland

    Karl Jousten

  2. Saes Getters SpA, Viale Italia 77, 20020, Lainate, Italien

    Paolo Manini

Authors
  1. Karl Jousten
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  2. Paolo Manini
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Correspondence to Karl Jousten .

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Editors and Affiliations

  1. Berlin, Berlin, Germany

    Karl Jousten

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Jousten, K., Manini, P. (2017). Passive Sorptionspumpen. In: Jousten, K. (eds) Handbuch Vakuumtechnik. Springer Reference Technik . Springer Vieweg, Wiesbaden. https://doi.org/10.1007/978-3-658-13403-7_22-1

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  • DOI: https://doi.org/10.1007/978-3-658-13403-7_22-1

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  • Print ISBN: 978-3-658-13403-7

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