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CIRP Encyclopedia of Production Engineering pp 1–4Cite as

Ultraprecision

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Synonyms

Extreme precision; Super precision

Definition

“Ultraprecision” is defined as the state, quality, or condition of being extremely precise. Therefore, an ultraprecision machine is characterized by extremely accurate motion, dimensions, or machining capability. Technical terms with “ultraprecision” include ultraprecision machine tool, ultraprecision diamond turning machine, ultraprecision machining technology, ultraprecision metrology, etc.

Theory and Application

A long history of production engineering has shown that the realization of ultraprecision machine is one of the most attractive subjects. As a typical example of ultraprecision machine, ultraprecision machine tools will be described here.

State-of-the-Art Industrial Requirements

Demands for ultraprecision machining technologies have recently increased in a wide range of industries, i.e., aerospace, semiconductor, optics, energy, etc. In particular, structured surfaces with micro- and nano-sized patterns have recently...

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References

  • Shinno H (2010) Chapter 4: Various remedies for reduction of thermal deformation. In: Ito Y (ed) Thermal deformation in machine tools. McGraw-Hill, New York

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  • Shinno H, Hashizume H, Ito Y, Sato C (1992) Structural configuration and performances of machining environment-controlled ultraprecision diamond turning machine “capsule”. Ann CIRP 41(1):425–428

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  • Shinno H, Hashizume H, Yoshioka H (2003) Sensor-less monitoring of cutting force during ultraprecision machining. Ann CIRP 52(1):303–306

    Article  Google Scholar 

  • Shinno H, Yoshioka H, Taniguchi K (2007) A newly developed linear motor-driven aerostatic X–Y planar motion table system for nano-machining. Ann CIRP 56(1):369–372

    Article  Google Scholar 

  • Shinno H, Yoshioka H, Sawano H (2011) A newly developed long range positioning table system with a sub-nanometer resolution. CIRP Ann 60(1):403–406

    Article  Google Scholar 

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Author information

Authors and Affiliations

  1. Laboratory for Future Interdisciplinary Research of Science and Technology (FIRST), Tokyo Institute of Technology, Yokohama, Japan

    Hidenori Shinno

Authors
  1. Hidenori Shinno
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Corresponding author

Correspondence to Hidenori Shinno .

Editor information

Editors and Affiliations

  1. Engineering, paris, France

    The International Academy for Production

Section Editor information

  1. Institut für Werkzeugmaschinen, Universität Stuttgart, Stuttgart, Germany

    Hans-Christian Möhring

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© 2018 CIRP

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Cite this entry

Shinno, H. (2018). Ultraprecision. In: The International Academy for Production (eds) CIRP Encyclopedia of Production Engineering. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-35950-7_6546-4

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  • DOI: https://doi.org/10.1007/978-3-642-35950-7_6546-4

  • Received:

  • Accepted:

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  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-35950-7

  • Online ISBN: 978-3-642-35950-7

  • eBook Packages: Springer Reference EngineeringReference Module Computer Science and Engineering

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