Abstract
With a significantly improved processing precision, quality, and flexibility in 3D space, ultrashort pulse laser processing at the micro- and nanoscales has exhibited superior performances in the fields of fundamental research and industrial manufacturing as compared with traditional long-pulse and continuous laser processing in the past decades. In this chapter, basic optics for ultrashort pulse laser micro-/nanoprocessing are introduced. Specifically, basic optical setups of two representative processing systems (3D ultrashort laser direct writing systems and laser parallel processing systems) are described as well as their crucial optical components. Recent advances of ultrashort laser micro-/nanoprocessing such as spatiotemporal beam shaping and homogenization of femtosecond laser pulses are presented. Moreover, typical diagnosis systems for ultrashort pulse laser processing such as basic optical setups for measurement of pulse durations and transient pump-probe imaging are briefly summarized.
This is a preview of subscription content, log in via an institution to check access.
References
Bellouard Y, Champion A, Lenssen B, Matteucci M, Schaap A, Beresna M, Corbari C, Gecevičius M, Kazansky P, Chappuis O, Kral M, Clavel R, Barrot F, Breguet J-M, Mabillard Y, Bottinelli S, Hopper M, Hoenninger C, Mottay E, Lopez J (2012) J Laser Micro/Nanoeng 7:1
Cheng Y, Sugioka K, Midorikawa K, Masuda M, Toyoda K, Kawachi M, Shihoyama K (2003) Opt Lett 28:55
Chichkov BN, Momma C, Nolte S, von Alvensleben F, Tünnermann A (1996) Appl Phys A Mater Sci Process 63:109
Chu W, Tan Y, Wang P, Xu J, Li W, Qi J, Cheng Y (2018) Adv Mater Technol 3:1700396
Davis KM, Miura K, Sugimoto N, Hirao K (1996) Opt Lett 21:1729
Deubel M, von Freymann G, Wegener M, Pereira S, Busch K, Soukoulis CM (2004) Nat Mater 3:444
Durfee CG, Greco M, Block E, Vitek D, Squier JA (2012) Opt Express 20:14244
Durst ME, Zhu G, Xu C (2006) Opt Express 14:12243
Gan Z, Cao Y, Evans RA, Gu M (2013) Nat Commun 4:2061
Gattass RR, Mazur E (2008) Nat Photonics 2:219
Glezer EN, Milosavljevic M, Huang L, Finlay RJ, Her TH, Callan JP, Mazur E (1996) Opt Lett 21:2023
Gottmann J, Hermans M, Ortmann J (2013) J Laser Micro/Nanoeng 8:15
Grossmann D, Reininghaus M, Kalupka C, Kumkar M, Poprawe R (2016) Opt Express 24:23221
Haque M, Lee KKC, Ho S, Fernandes LA, Herman PR (2014) Lab Chip 14:3817
Hasegawa S, Hayasaki Y, Nishida N (2006) Opt Lett 31:1705
He F, Xu H, Cheng Y, Ni J, Xiong H, Xu Z, Sugioka K, Midorikawa K (2010) Opt Lett 35:1106
He F, Cheng Y, Lin JT, Ni JL, Xu ZZ, Sugioka K, Midorikawa K (2011) New J Phys 13:083014
He F, Liao Y, Lin J, Song J, Qiao L, Cheng Y, Sugioka K (2014) Sensors 14:19402
Iaconis C, Walmsley IA (1998) Opt Lett 23:792
Itoh K, Watanabe W, Nolte S, Schaffer C (2006) MRS Bull 31:620
Jenne M, Flamm D, Ouaj T, Julian Hellstern, Grossmann D, Kumkar M, Nolte S (2018) Proc SPIE 10522:1052216
Joglekar AP, Liu H, Meyhöfer E, Mourou G, Hunt AJ (2004) Proc Natl Acad Sci 101:5856
Jonušauskas L, Gailevičius D, Rekštytė S, Baldacchini T, Juodkazis S, Malinauskas M (2019) Opt Express 27:15205
Kalupka C, Großmann D, Reininghaus M (2017) Appl Phys A Mater Sci Process 123:376
Kanitz A, Förster DJ, Hoppius JS, Weber R, Ostendorf A, Gurevich EL (2019) Appl Surf Sci 475:204
Kawata S, Sun HB, Tanaka T, Takada K (2001) Nature 412:697
Kim D, So PTC (2010) Opt Lett 35:1602
Kumkar M, Zimmermann F, Kleiner J, Flamm D, Jenne M, Grossmann D, Nolte S (2018) Proc SPIE 10522:105220H
Küper S, Stuke M (1987) Appl Phys B Lasers Opt 44:199
Li L, Gattass RR, Gershgoren E, Hwang H, Fourkas JT (2009) Science 324:910
Liao Y, Shen Y, Qiao L, Chen D, Cheng Y, Sugioka K, Midorikawa K (2013) Opt Lett 38:187
Malinauskas M, Žukauskas A, Hasegawa S, Hayasaki Y, Mizeikis V, Buividas R, Juodkazis S (2016) Light Sci Appl 5:e16133
Momma C, Chichkov BN, Nolte S, Alvensleben F, Tünnermann A, Welling H, Wellegehausen B (1996) Opt Commun 129:134
Nakata Y, Osawa K, Miyanaga N (2019) Sci Rep 9:4640
Oron D, Tal E, Silberberg Y (2005) Opt Express 13:1468
Osawa K, Yoshida M, Nakata Y, Miyanaga N, Narazaki A, Shoji T, Tsuboi Y (2017) Proc SPIE 10091:100911C
Osellame R, Taccheo S, Marangoni M, Ramponi R, Laporta P, Polli D, De Silvestri S, Cerullo G (2003) J Opt Soc Am B 20:1559
Osellame R, Hoekstra HJWM, Cerullo G, Pollnau M (2011) Laser Photonics Rev 5:442
Ródenas A, Gu M, Corrielli G, Paiè P, John S, Kar AK, Osellame R (2019) Nat Photonics 13:105
Sakakura M, Tochio T, Eida M, Shimotsuma Y, Kanehira S, Nishi M, Miura K, Hirao K (2011) Opt Express 19:17780
Shi W, Fang Q, Zhu X, Norwood RA, Peyghambarian N (2014) Appl Opt 53:6554
Sima F, Sugioka K, Vázquez RM, Osellame R, Kelemen L, Ormos P (2018) Nanophotonics 7:613
Srinivasan R, Sutcliffe E, Braren B (1987) Appl Phys Lett 51:1285
Sugioka K (2019) Int J Extrem Manuf 1:012003
Sugioka K, Cheng Y (2012) Adv Opt Techn 1:353
Sugioka K, Cheng Y (2014a) Light Sci Appl 3:e149
Sugioka K, Cheng Y (2014b) Appl Phys Rev 1:041303
Sugioka K, Cheng Y, Midorikawa K, Takase F, Takai H (2006) Opt Lett 31:208
Sugioka K, Xu J, Wu D, Hanada Y, Wang Z, Cheng Y, Midorikawa K (2014) Lab Chip 14:3447
Sun B, Salter PS, Roider C, Jesacher A, Strauss J, Heberle J, Schmidt M, Booth MJ (2018) Light Sci Appl 7:17117
Tan D, Li Y, Qi F, Yang H, Gong Q (2007) Appl Phys Lett 90:071106
Tan Y, Wang Z, Chu W, Liao Y, Qiao L, Cheng Y (2016) Opt Mater Express 6:3787
Trebino R, DeLong KW, Fittinghoff DN, Sweetser JN, Krumbügel MA, Richman BA, Kane DJ (1997) Rev Sci Instrum 68:3277
Tünnermann A, Schreiber T, Limpert J (2010) Appl Opt 49:F71
Vitek DN, Adams DE, Johnson A, Tsai PS, Backus S, Durfee CG (2010) Opt Express 18:18086
Wang H, Zhang Y, Wang W, Ding H, Sun HB (2017) Laser Photonics Rev 11:1600116
Wang P, Chu W, Li W, Tan Y, Qi J, Liao Y, Wang Z, Cheng Y (2018) Opt Lett 43:3485
Watanabe W, Li Y, Itoh K (2016) Opt Laser Technol 78:52
Xu B, Zhang Y, Xia H, Dong W, Ding H, Sun HB (2013) Lab Chip 13:1677
Zhu G, van Howe J, Durst M, Zipfel W, Xu C (2005) Opt Express 13:2153
Author information
Authors and Affiliations
Corresponding authors
Editor information
Editors and Affiliations
Section Editor information
Rights and permissions
Copyright information
© 2020 Springer Nature Switzerland AG
About this entry
Cite this entry
Xu, J., Cheng, Y., Sugioka, K. (2020). Basic Optics and Diagnostics Apparatus for Ultrashort Pulse Laser Micro-/Nanoprocessing. In: Sugioka, K. (eds) Handbook of Laser Micro- and Nano-Engineering. Springer, Cham. https://doi.org/10.1007/978-3-319-69537-2_8-1
Download citation
DOI: https://doi.org/10.1007/978-3-319-69537-2_8-1
Received:
Accepted:
Published:
Publisher Name: Springer, Cham
Print ISBN: 978-3-319-69537-2
Online ISBN: 978-3-319-69537-2
eBook Packages: Springer Reference Physics and AstronomyReference Module Physical and Materials ScienceReference Module Chemistry, Materials and Physics