Abstract
Laser processing has been applied in various fields, including optoelectronics, the automotive and aerospace industries, and biomedicine. Thus, the properties of laser-processed samples to be evaluated differ depending on their purpose, and an optimal approach for each application should be selected. In this chapter, we focus on some typical evaluation metrics required in general cases, such as surface morphology, cross-sectional profile, composition, and crystallinity; these can be determined using scanning electron microscopy with energy-dispersive X-ray spectroscopy (SEM-EDX), confocal laser scanning microscopy, X-ray photoelectron spectroscopy (XPS), X-ray diffraction, and Raman spectroscopy. Since the characteristics of the information obtained by each measurement differ, an optimal method must be selected for a given purpose. For example, SEM-EDX can measure the local composition on a microscale after laser processing; conversely, to measure the composition with a higher surface sensitivity, XPS is preferable. Recently, laser processing has increasingly been applied to complicated devices, and there are an increasing number of cases in which the characteristics of laser-processed devices are evaluated. Examples of device characterization after laser processing are also introduced for thin film solar cells scribed by ultrashort pulse lasers. Improved characterization of laser-processed samples will help to accelerate process optimization and social implementation of laser processing in the future.
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Narazaki, A. (2021). Characterization of Laser-Processed Samples. In: Sugioka, K. (eds) Handbook of Laser Micro- and Nano-Engineering. Springer, Cham. https://doi.org/10.1007/978-3-319-69537-2_64-1
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DOI: https://doi.org/10.1007/978-3-319-69537-2_64-1
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