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Handbook of Porous Silicon pp 11–22Cite as

Porous Silicon Formation by Anodization

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Abstract

The key aspects of porous silicon manufactured by anodization are reviewed, with the following subjects being addressed: anodization of different wafer types, wafer cell design, post-anodization handling requirements (rinsing/drying/storage), parameters affecting layer uniformity, the use of nonaqueous electrolytes and electrolyte additives (surfactants, oxidizers, and other types), methods for tuning porosity, process control and natural variability, different electrode materials, and the requirements for maintaining health and safety.

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Authors and Affiliations

  1. pSiMedica Ltd, Malvern Hills Science Park, Geraldine Road, Malvern, Worcestershire, UK

    Armando Loni

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  1. Armando Loni
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Correspondence to Armando Loni .

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Editors and Affiliations

  1. Malvern, Worcestershire, United Kingdom

    Leigh Canham

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© 2014 Springer International Publishing Switzerland

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Loni, A. (2014). Porous Silicon Formation by Anodization. In: Canham, L. (eds) Handbook of Porous Silicon. Springer, Cham. https://doi.org/10.1007/978-3-319-05744-6_2

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