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MACE Silicon Nanostructures

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Handbook of Porous Silicon

Abstract

Metal-assisted chemical etching (MACE) of silicon is receiving much interest as a controllable method of generating silicon nanostructures of varied forms, including porous silicon. The various morphologies, etch chemistry variables (e.g., metal catalysts, substrate type, electrolyte temperature), and potential applications of the resulting nanostructures are reviewed.

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Author information

Authors and Affiliations

  1. Department of Materials, Imperial College London, Faculty of Engineering, London, UK

    Ciro Chiappini

Authors
  1. Ciro Chiappini
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Corresponding author

Correspondence to Ciro Chiappini .

Editor information

Editors and Affiliations

  1. Malvern, Worcestershire, United Kingdom

    Leigh Canham

Additional information

Kim et al. (2011), Geyer et al. (2012), Chiappini et al. (2010), Chartier et al. (2008), Li and Bohn (2000), Dudley and Kolasinski (2009), Peng et al. (2003, 2006), Yae et al. (2007) of particular interest.

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© 2014 Springer International Publishing Switzerland

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Chiappini, C. (2014). MACE Silicon Nanostructures. In: Canham, L. (eds) Handbook of Porous Silicon. Springer, Cham. https://doi.org/10.1007/978-3-319-05744-6_17

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