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Handbook of Porous Silicon pp 153–162Cite as

Porous Silicon Multilayers and Superlattices

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Abstract

Electrochemical etching of silicon can generate porous silicon where porosity is modulated with depth. The overall fabrication technique, experimental tips for improving uniformity, typical porosity profiles, and methods of patterning and stabilization are reviewed. Due to its ease of fabrication, such multilayers have been extensively fabricated and applied in different fields, such as photonics, phononics, sensing etc.

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Authors and Affiliations

  1. Centro de Investigacion en Ingenieria y Ciencias Aplicadads, Universidad Autonoma del Estado de Morelos, Av. Universidad 1001, Col. Chamilpa, Cuernavaca, 62209, Mexico

    Vivechana Agarwal

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  1. Vivechana Agarwal
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Correspondence to Vivechana Agarwal .

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Editors and Affiliations

  1. Malvern, Worcestershire, United Kingdom

    Leigh Canham

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Agarwal, V. (2014). Porous Silicon Multilayers and Superlattices. In: Canham, L. (eds) Handbook of Porous Silicon. Springer, Cham. https://doi.org/10.1007/978-3-319-05744-6_15

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