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Handbook of Biochips pp 1–12Cite as

Chip-Based MEMS for Healthcare Application

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Abstract

This paper reviews the recent development of micro-/nanosensors to detect air pollutants. Various sensor technologies to measure particles and gaseous pollutants are introduced. For particulate pollutants including particulate matter (PM) 10 (PM10), PM2.5, and nanoparticles, the development and sensitivities of resonate sensors are investigated. For gaseous pollutant detection, nanostructured metal oxide, surface acoustic wave sensors, field-effect transistor sensors, and microcantilever sensor system are briefly discussed. Sensors with a microelectromechanical systems (MEMS) technology showed high sensitivities, accuracy, and selectivity for air pollutants. Air quality monitoring chip using MEMS technology is based on the increasing demand for more compact, integrated, and personalized device to monitor the in situ level of air pollutants with simple operation and high precision in real time. Furthermore, the potential of the chip-based MEMS for healthcare applications is investigated.

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Authors and Affiliations

  1. Gachon BioNano Research Institute, Gachon University, Seongnam-si, Gyeonggi-do, South Korea

    Jae Sun Lee

  2. Department of Industrial Environmental Engineering, Gachon University, Seongnam-si, Gyeonggi-do, South Korea

    Rajamanickam Sivakumar

  3. Department of BioNano Technology, Gachon University, Seongnam-si, Gyeonggi-do, South Korea

    Nae Yoon Lee

Authors
  1. Jae Sun Lee
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  2. Rajamanickam Sivakumar
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  3. Nae Yoon Lee
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Corresponding author

Correspondence to Nae Yoon Lee .

Editor information

Editors and Affiliations

  1. School of Engineering, Westlake University, Hangzhou, Zhejiang, China

    Mohamad Sawan

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Lee, J.S., Sivakumar, R., Lee, N.Y. (2020). Chip-Based MEMS for Healthcare Application. In: Sawan, M. (eds) Handbook of Biochips. Springer, New York, NY. https://doi.org/10.1007/978-1-4614-6623-9_55-1

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  • DOI: https://doi.org/10.1007/978-1-4614-6623-9_55-1

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  • Publisher Name: Springer, New York, NY

  • Print ISBN: 978-1-4614-6623-9

  • Online ISBN: 978-1-4614-6623-9

  • eBook Packages: Springer Reference EngineeringReference Module Computer Science and Engineering

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