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Dynamics and Control of Active Microcantilevers

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Encyclopedia of Systems and Control


The microcantilever is a key precision mechatronic component of many technologies for characterization and manipulation of matter at the nanoscale, particularly in the atomic force microscope. When a cantilever is operated in a regime that requires the direct excitation and measurement of its resonance frequencies, appropriate instrumentation and control is crucial for high-performance operation. In this entry, we discuss integrated cantilever actuation and present the cantilever transfer function model and its properties. As a result of using these active cantilevers, the ability to control the quality factor in order to manipulate the cantilever tracking bandwidth is demonstrated.

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Correspondence to Michael G. Ruppert .

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Ruppert, M.G., Moheimani, S.O.R. (2020). Dynamics and Control of Active Microcantilevers. In: Baillieul, J., Samad, T. (eds) Encyclopedia of Systems and Control. Springer, London.

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  • Print ISBN: 978-1-4471-5102-9

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Chapter history

  1. Latest

    Dynamics and Control of Active Microcantilevers
    16 November 2019


  2. Original

    Control for High-Speed Nanopositioning
    13 February 2014