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Scanning Probe Microscope Imaging Control

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Encyclopedia of Systems and Control

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Abstract

Scanning probe microscope (SPM) imaging control is to maintain a micromachined cantilever tip at the desired position with respect to the sample at nanoscale resolution while the probe is scanning the sample. The main objective is to drive the cantilever probe using piezoelectric actuators to follow the sample topography profile during the scanning process. Beyond conventional PI-feedback control, different approaches have been developed, ranging from robust control, adaptive control, to inversion-based feedforward-feedback control and iterative-based feedforward-feedback control. These developments have demonstrated various levels of improvements over PI-control.

Supported by NSF CAREER Award 1751503 (Ren) and NSF Grants 1353890 and 1663055 (Zou)

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Author information

Authors and Affiliations

  1. Mechanical Engineering Department, Iowa State University, Ames, IA, USA

    Juan Ren

  2. Mechanical and Aerospace Engineering Department, Rutgers, The State University of New Jersey, New Brunswick, NJ, USA

    Qingze Zou

Authors
  1. Juan Ren
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  2. Qingze Zou
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Corresponding author

Correspondence to Qingze Zou .

Editor information

Editors and Affiliations

  1. Electrical and Computer Engineering, Boston University, Boston, MA, USA

    John Baillieul

  2. Automation and Control Solutions, Honeywell, Golden Valley, MN, USA

    Tariq Samad

Section Editor information

  1. University of Texas at Dallas, Dallas, TX, USA

    S. O. Reza Moheimani

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Ren, J., Zou, Q. (2020). Scanning Probe Microscope Imaging Control. In: Baillieul, J., Samad, T. (eds) Encyclopedia of Systems and Control. Springer, London. https://doi.org/10.1007/978-1-4471-5102-9_100086-1

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  • DOI: https://doi.org/10.1007/978-1-4471-5102-9_100086-1

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  • Publisher Name: Springer, London

  • Print ISBN: 978-1-4471-5102-9

  • Online ISBN: 978-1-4471-5102-9

  • eBook Packages: Springer Reference EngineeringReference Module Computer Science and Engineering

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