Abstract
Motion systems are a key enabling technology in manufacturing machines and scientific instruments. Indeed, these motion systems perform the positioning with high speed and accuracy, where typical requirements are in the micrometer or even nanometer range. This is achieved through a mechatronic system design, which includes actuators, sensors, mechanics, and control. The aim of this entry is to outline advanced motion control for precision mechatronics. Both feedback and feedforward control are covered. Their specific designs are heavily influenced by considerations regarding efficient and accurate modeling techniques. Extensions to complex multivariable systems are outlined, as well as challenges induced by envisaged future application requirements.
Bibliography
Åström KJ, Murray RM (2008) Feedback systems: an introduction for scientists and engineers. Princeton University Press, Princeton
Blanken L, Boeren F, Bruijnen D, Oomen T (2017) Batch-to-batch rational feedforward control: from iterative learning to identification approaches, with application to a wafer stage. IEEE Trans Mechatron 22(2): 826–837
Bristow DA, Tharayil M, Alleyne AG (2006) A survey of iterative learning control: a learning-based method for high-performance tracking control. IEEE Control Syst Mag 26(3):96–114
Devasia S, Eleftheriou E, Moheimani S (2007) A survey of control issues in nanopositioning. IEEE Trans Control Syst Technol 15(5):802–823
Fleming AJ, Leang KK (2014) Design, modeling and control of nanopositioning systems. Springer, Cham
Gawronski WK (2004) Advanced structural dynamics and active control of structures. Springer, New York
Lambrechts P, Boerlage M, Steinbuch M (2005) Trajectory planning and feedforward design for electromechanical motion systems. Control Eng Pract 13: 145–157
Lee HS, Tomizuka M (1996) Robust motion controller design for high-accuracy positioning systems. IEEE Trans Ind Electron 43(1):48–55
Munnig Schmidt R, Schitter G, van Eijk J (2011) The design of high performance mechatronics. Delft University Press, Delft
Ohnishi K, Shibata M, Murakami T (1996) Motion control for advanced mechatronics. IEEE Trans Mechatron 1(1):56–67
Oomen T (2018) Advanced motion control for precision mechatronics: control, identification, and learning of complex systems. IEEJ IEEE Trans Ind Appl 7(2): 127–140
Pintelon R, Schoukens J (2012) System identification: a frequency domain approach, 2nd edn. IEEE Press, New York
Skogestad S, Postlethwaite I (2005) Multivariable feedback control: analysis and design, 2nd edn. John Wiley & Sons, West Sussex
Steinbuch M, Norg ML (1998) Advanced motion control: An industrial perspective. Eur J Control 4(4):278–293
Voorhoeve R, van der Maas A, Oomen T (2018) Non-parametric identification of multivariable systems: A local rational modeling approach with application to a vibration isolation benchmark. Mech Syst Signal Process 105:129–152
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Oomen, T. (2020). Control for Precision Mechatronics. In: Baillieul, J., Samad, T. (eds) Encyclopedia of Systems and Control. Springer, London. https://doi.org/10.1007/978-1-4471-5102-9_100044-1
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DOI: https://doi.org/10.1007/978-1-4471-5102-9_100044-1
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