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Focused Ion Beam Nanofabrication Technology

  • Zong Wei Xu
  • Fengzhou Fang
  • Guosong Zeng
Reference work entry

Abstract

Focused ion beam has become an increasingly popular tool for the manufacturing of various types of micro-/nanostructures and devices for different applications. In this chapter, the recent developments of the FIB technologies in the micro/nano manufacturing are presented in details. FIB technologies mainly involve four main approaches: imaging, milling, ion-induced deposition, and implantation. The working principle and key techniques underlying the four approaches are introduced with an emphasis on their abilities in micro-/nanofabrications. The application fields involving using the FIB micro-/nanofabrication technologies are also presented, such as micro optical elements, plasmonic lenses, etc. Concluding remarks and outlook of the future research on the FIB technologies in micro/nano manufacturing are provided at the end of the chapter.

Keywords

Plasmonic Lens Micro Optical Element Beam Dwell Time Direct Writing Method Silicon Photonic Device 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag London 2015

Authors and Affiliations

  1. 1.College of Precision Instrument and Opto-Electronic Engineering, Centre of MicroNano Manufacturing TechnologyTianjin UniversityNankai District, TianjinChina
  2. 2.Department of Mechanical Engineering and MechanicsP.C. Rossin College of Engineering and Applied Science, Lehigh UniversityBethlehemUSA
  3. 3.The State Key Laboratory of Precision Measuring Technology & Instruments, Centre of MicroNano Manufacturing TechnologyTianjin UniversityTianjinChina

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