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Focused Ion Beam Nanofabrication Technology

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Handbook of Manufacturing Engineering and Technology

Abstract

Focused ion beam has become an increasingly popular tool for the manufacturing of various types of micro-/nanostructures and devices for different applications. In this chapter, the recent developments of the FIB technologies in the micro/nano manufacturing are presented in details. FIB technologies mainly involve four main approaches: imaging, milling, ion-induced deposition, and implantation. The working principle and key techniques underlying the four approaches are introduced with an emphasis on their abilities in micro-/nanofabrications. The application fields involving using the FIB micro-/nanofabrication technologies are also presented, such as micro optical elements, plasmonic lenses, etc. Concluding remarks and outlook of the future research on the FIB technologies in micro/nano manufacturing are provided at the end of the chapter.

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Author information

Authors and Affiliations

  1. College of Precision Instrument and Opto-Electronic Engineering, Centre of MicroNano Manufacturing Technology, Tianjin University, No.92, Weijin Road, 300072, Nankai District, Tianjin, China

    Zong Wei Xu

  2. Department of Mechanical Engineering and Mechanics, P.C. Rossin College of Engineering and Applied Science, Lehigh University, Packard Laboratory, 19 Memorial Drive West, Bethlehem, PA, 18015, USA

    Guosong Zeng

  3. The State Key Laboratory of Precision Measuring Technology & Instruments, Centre of MicroNano Manufacturing Technology, Tianjin University, Tianjin, China

    Fengzhou Fang

Authors
  1. Zong Wei Xu
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  2. Fengzhou Fang
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  3. Guosong Zeng
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Corresponding author

Correspondence to Zong Wei Xu .

Editor information

Editors and Affiliations

  1. Faculty of Engineering, Mechanical Engineering Department, National University of Singapore, Singapore, Singapore

    Andrew Y. C. Nee

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© 2015 Springer-Verlag London

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Xu, Z.W., Fang, F., Zeng, G. (2015). Focused Ion Beam Nanofabrication Technology. In: Nee, A. (eds) Handbook of Manufacturing Engineering and Technology. Springer, London. https://doi.org/10.1007/978-1-4471-4670-4_66

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