Abstract
Nanomanufacturing utilizes value-added processes to control materials structures, components, devices, and systems at the nanoscale for reproducible, commercial-scale production. It is the essential bridge between the discoveries of nanoscience and real-world nanotechnology products. In recent years, ion beam technology has found wide applications in nano precision or nanoscale manufacturing. Ion beam nanomanufacturing (IBNM) technologies mainly consist of four approaches: ion-induced imaging, ion milling removal, ion-induced deposition, and ion implantation or modification, which are usually performed under a stream of accelerated ions by electrical means. Versatile materials can be processed by IBNM, such as diamond, metals, thin films, polymers, and semiconductors.
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© 2015 Springer-Verlag London
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Fang, F. (2015). Introduction to Nanomanufacturing Using Ion Beam Technology. In: Nee, A. (eds) Handbook of Manufacturing Engineering and Technology. Springer, London. https://doi.org/10.1007/978-1-4471-4670-4_64
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DOI: https://doi.org/10.1007/978-1-4471-4670-4_64
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Publisher Name: Springer, London
Print ISBN: 978-1-4471-4669-8
Online ISBN: 978-1-4471-4670-4
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