Ion Beam Instruments Used for Nanomanufacturing

Abstract

The understanding of the physics and mechanism and the ability of imaging, manipulation as well as fabrication of devices and systems at nanometer scale is undoubtedly the frontier of today’s science and technology. The momentum of current research and industrial progress calls for continuous development of new state-of-the-art tools. The interdisciplinary fields of material science, physics, biology, mechanics, and electronics clearly perpetually seek superpower facilities that persist integrated functions to conduct operation as well as to see the nano-world. The ion beam (IB) technology is one of them that can meet the demands of today’s science and technology. In this chapter, we present a basic introduction of the ion beam instruments, which are classified into two catalogs that based on focused ion beams and broad beams. In particular, the ion sources, ion optics, and some most advanced focused ion beam facilities are discussed followed by the brief introduction of broad beam instruments for nanofabrication, including the ion beam etching, deposition, and implantation systems.