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Mechanical Testing at the Micro/Nanoscale

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Springer Handbook of Experimental Solid Mechanics

Part of the book series: Springer Handbooks ((SHB))

Abstract

Mechanical testing of micro- and nanoscale materials such as thin films, nanotubes and nanowires, and cellular and subcellular biomaterials is a significant step towards the realization of nanoscale devices and is essential for the commercialization of microscale integrated systems. The challenges in mechanical testing at these smaller length scales emanate from the very basic (specimen preparation and manipulation, high-resolution force and displacement sensing) to complex (enhanced multiphysics coupling, specimen–environment interaction) experimental issues. In this chapter, we attempt to focus on these issues in light of the existing and potential solutions as we review the state of the art in micro- and nanoscale mechanical testing as well as our understanding of materials behavior at these length scales.

This chapter is divided into six sections. The first section introduces the research problem in micro/nanomechanical testing and describes the evolution for the need of this research area with examples in micro/nanoscale materials phenomena. The second section describes the challenges in nanomechanical testing and commonly studied materials. The third section provides a broad overview of the available tools and techniques. The vastness of the relevant literature means that this review essentially is incomplete and instead, the section focuses on the techniques that are most commonly used or have very high potential. The fourth section is devoted to bio-materials, which are ultra compliant and sensitive to the environment and thus present the ultimate challenge in mechanical testing. Section five provides a critical analysis of the available techniques and the emerging problems in mechanical testing and opportunities and challenges therein. Finally, section six suggests further readings.

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Abbreviations

AFM:

atomic force microscopy

DIC:

digital image correlation

DRIE:

deep reactive-ion etching

FAC:

focal adhesion complex

FIB:

focused ion beam

ISDG:

interferometric strain/displacement gage

MEMS:

micro-electromechanical system

MW(C)NT:

multiwalled (carbon) nanotubes

NC:

nanocrystalline

RF:

radiofrequency

SEM:

Society for Experimental Mechanics

SEM:

scanning electron microscopy

STM:

scanning tunneling microscope

SW(C)NT:

single-walled (carbon) nanotubes

TEM:

transmission electron microscopy

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Authors and Affiliations

  1. Department of Mechanical Engineering, Pennsylvania State University, 317A Leonhard Building, 16802, University Park, PA, USA

    M. Amanul Haque Ph.D

  2. Micro and Nanotechnology Laboratory, 2101D Mechanical Engineering Laboratory, University of Illinois at Urbana-Champaign, 1206 West Green Street, 61801, Urbana, IL, USA

    Taher Saif Prof.

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Correspondence to M. Amanul Haque Ph.D or Taher Saif Prof. .

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  1. Department of Mechanical Engineering, Room 126, Latrobe Hall, The Johns Hopkins University, 21218-2681, Baltimore, MD, USA, 3400 North Charles Street

    William N. Sharpe Jr. Prof.

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Haque, M.A., Saif, T. (2008). Mechanical Testing at the Micro/Nanoscale. In: Sharpe, W. (eds) Springer Handbook of Experimental Solid Mechanics. Springer Handbooks. Springer, Boston, MA. https://doi.org/10.1007/978-0-387-30877-7_30

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