Abstract
New feasibilities are considered for optical correlation diagnostics of rough surfaces with various distributions of irregularities. The influence of deviations of the height surface roughness distribution from a Gaussian probability distribution on the accuracy of optical analysis is discussed. The possibilities for optical diagnostics of fractal surface structures are shown and the set of statistical and dimensional parameters of the scattered fields for surface roughness diagnostics is determined. Fast-operating optical correlation devices for roughness control are presented.
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Angelsky, O.V., Maksimyak, P.P. (2004). Optical Correlation Diagnostics of Surface Roughness. In: Tuchin, V.V. (eds) Handbook of Coherent Domain Optical Methods. Springer, New York, NY. https://doi.org/10.1007/0-387-29989-0_2
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DOI: https://doi.org/10.1007/0-387-29989-0_2
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