Scatterometry is a technique for measuring periodic structures on a surface with dimensions from a few nanometers to tens of micrometers. Scatterometry is a fast, nondestructive technique and is, therefore, suitable for in-line metrology.
Theory and Applications
The basic working principle of scatterometry is to use the information in the interference of light interacting with periodic structures, for example, a diffraction grating, to characterize a surface. The intensities of the resulting diffraction orders are used as a unique fingerprint for a given surface. Scatterometry is often applied where imaging techniques cannot be used due to a lack of resolution and can be considered a super-resolution technique.