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Ion Beam Machining

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Author information

Authors and Affiliations

  1. State Key Laboratory of Precision Measuring Technology & Instruments, Centre of MicroNano Manufacturing Technology, Tianjin University, Tianjin, China

    Fengzhou Fang

  2. Centre of MicroNano Manufacturing Technology (MNMT-Dublin), University College Dublin, Dublin, Ireland

    Fengzhou Fang

  3. College of Precision Instrument and Opto-Electronic Engineering, Centre of MicroNano Manufacturing Technology, Tianjin University, Tianjin, China

    Zong Wei Xu

Authors
  1. Fengzhou Fang
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  2. Zong Wei Xu
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Corresponding author

Correspondence to Fengzhou Fang .

Editor information

Editors and Affiliations

  1. Engineering, paris, France

    The International Academy for Production

Section Editor information

  1. Institut für Transport- und Automatisierungstechnik, Gottfried Wilhelm Leibniz Universität Hannover, Garbsen, Deutschland

    Ludger Overmeyer

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Fang, F., Xu, Z.W. (2018). Ion Beam Machining. In: The International Academy for Production (eds) CIRP Encyclopedia of Production Engineering. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-35950-7_6485-4

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  • DOI: https://doi.org/10.1007/978-3-642-35950-7_6485-4

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  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-35950-7

  • Online ISBN: 978-3-642-35950-7

  • eBook Packages: Springer Reference EngineeringReference Module Computer Science and Engineering

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