Dynamics and Control of Active Microcantilevers
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The microcantilever is a key precision mechatronic component of many technologies for characterization and manipulation of matter at the nanoscale, particularly in the atomic force microscope. When a cantilever is operated in a regime that requires the direct excitation and measurement of its resonance frequencies, appropriate instrumentation and control is crucial for high-performance operation. In this entry, we discuss integrated cantilever actuation and present the cantilever transfer function model and its properties. As a result of using these active cantilevers, the ability to control the quality factor in order to manipulate the cantilever tracking bandwidth is demonstrated.
KeywordsAtomic force microscopy Flexible structures Piezoelectric actuators and sensors Vibration control Q control Negative imaginary systems
- Rangelow IW, Ivanov T, Ahmad A, Kaestner M, Lenk C, Bozchalooi IS, Xia F, Youcef-Toumi K, Holz M, Reum A (2017) Review article: Active scanning probes: a versatile toolkit for fast imaging and emerging nanofabrication. J Vac Sci Technol B 35(6):06G101Google Scholar