Encyclopedia of Systems and Control

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| Editors: John Baillieul, Tariq Samad

Dynamics and Control of Active Microcantilevers

Living reference work entry

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DOI: https://doi.org/10.1007/978-1-4471-5102-9_184-2
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Abstract

The microcantilever is a key precision mechatronic component of many technologies for characterization and manipulation of matter at the nanoscale, particularly in the atomic force microscope. When a cantilever is operated in a regime that requires the direct excitation and measurement of its resonance frequencies, appropriate instrumentation and control is crucial for high-performance operation. In this entry, we discuss integrated cantilever actuation and present the cantilever transfer function model and its properties. As a result of using these active cantilevers, the ability to control the quality factor in order to manipulate the cantilever tracking bandwidth is demonstrated.

Keywords

Atomic force microscopy Flexible structures Piezoelectric actuators and sensors Vibration control Q control Negative imaginary systems 
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Authors and Affiliations

  1. 1.The University of NewcastleCallaghanAustralia
  2. 2.The University of Texas at DallasRichardsonUSA

Section editors and affiliations

  • S. O. Reza Moheimani
    • 1
  1. 1.University of Texas at DallasDallasUSA