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A scanning electron microscope (SEM) is an instrument for imaging topography and for obtaining material information of conductive specimen using a focused beam of high-energy electrons. The electron beam is deflected in a magnetic field and performs a scanning movement in a raster pattern to capture the specimens’ surface. For imaging purposes interaction phenomena of the electron beam with the specimen like emission of secondary electrons (SE) or backscattered electrons (BSE) are detected and converted to grey values. A frequency analysis of X-rays reveals information about the present material. Nonconductive surfaces have to be covered with a conductive layer.
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Schmitt, R. (2019). Scanning Electron Microscope. In: Chatti, S., Laperrière, L., Reinhart, G., Tolio, T. (eds) CIRP Encyclopedia of Production Engineering. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-53120-4_6595
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DOI: https://doi.org/10.1007/978-3-662-53120-4_6595
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