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Handbook of Advanced Non-Destructive Evaluation pp 1–34Cite as

Grazing Incidence X-Ray Reflectivity and Scattering

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Abstract

The nondestructive evaluation (NDE) technique of grazing incidence X-ray reflectivity is described and set in its historical context. Use of X-ray reflectivity to determine near-surface density is described and the determination of surface interface width presented. It is shown how measurement of the diffuse scatter is necessary in order to distinguish topological surface roughness from compositional grading, as both effects have an identical effect on the true specular scatter. Metrology of single and multiple films is presented, and it is shown how automated fitting of model structures enables the user to extract film thickness with a precision of typically 20 pm. It is demonstrated that the limits of film thickness suitable for such metrology are between 2 nm and 1 μm on flat and smooth substrates. In the context of use of X-ray reflectivity as an NDE technique in a manufacturing environment, there is discussion of approaches to very rapid data collection.

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Authors and Affiliations

  1. Department of Physics, Durham University, Durham, UK

    Brian K. Tanner

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  1. Brian K. Tanner
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Correspondence to Brian K. Tanner .

Editor information

Editors and Affiliations

  1. Department of Electrical and Computer Engineering, The University of Akron, Akron, Ohio, USA

    Nathan Ida

  2. Center for Nondestructive Evaluation, Iowa State University Center for Nondestructive Evaluation, Ames, Iowa, USA

    Norbert Meyendorf

Section Editor information

  1. Department of Electrical and Computer Engineering, University of Akron, Akron, USA

    Ida Nathan

  2. Center for Nondestructive Evaluation, Iowa State University, Ames, IA, USA

    Norbert Meyendorf

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Tanner, B.K. (2018). Grazing Incidence X-Ray Reflectivity and Scattering. In: Ida, N., Meyendorf, N. (eds) Handbook of Advanced Non-Destructive Evaluation. Springer, Cham. https://doi.org/10.1007/978-3-319-30050-4_16-1

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  • DOI: https://doi.org/10.1007/978-3-319-30050-4_16-1

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  • Print ISBN: 978-3-319-30050-4

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