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Table of contents

  1. Front Matter
    Pages i-xx
  2. Cutting Technology

    1. Front Matter
      Pages 1-1
    2. Lars Schönemann, Ekkard Brinksmeier
      Pages 3-31
    3. Takashi Matsumura
      Pages 33-66
    4. Yasuhiro Kakinuma, Yuta Mizumoto
      Pages 67-95
    5. Xichun Luo, Zhen Tong
      Pages 97-137
    6. Hongjin Jung, Takehiro Hayasaka, Eiji Shamoto
      Pages 139-181
    7. Rui Huang, XinQuan Zhang, Kui Liu
      Pages 183-213
    8. Mao Mukaida, Jiwang Yan
      Pages 215-244
  3. Abrasive/Tip-Based Machining Technology

    1. Front Matter
      Pages 245-245
    2. Masayoshi Mizutani, Shaolin Xu, Keita Shimada, Tsunemoto Kuriyagawa
      Pages 247-299
    3. Anthony T. Beaucamp
      Pages 333-369
    4. Lingbao Kong, Zhongchen Cao, Laiting Ho
      Pages 371-420
    5. Zhenyu Zhang, Bo Wang, Dongming Guo
      Pages 421-444
  4. High-Energy Beam Machining Technology

    1. Front Matter
      Pages 479-479
    2. Mitsuhiro Terakawa
      Pages 481-498
    3. Hu Huang, Jiwang Yan
      Pages 499-527
    4. Noritaka Kawasegi
      Pages 529-554
    5. Jun Taniguchi
      Pages 555-575
    6. Zhiyu Zhang, Ruoqiu Wang, Donglin Xue
      Pages 577-604
  5. Molding/Forming/Self-Organization Technology

    1. Front Matter
      Pages 605-605
    2. Paritat Muanchan, Hiroshi Ito
      Pages 607-634
    3. Ahmad Rosli Abdul Manaf, Jiwang Yan
      Pages 661-690
    4. Hiroaki Onoe, Koki Yoshida
      Pages 691-710
    5. Masahiko Yoshino, Motoki Terano
      Pages 711-744
  6. Physical/Chemical Machining Technology

    1. Front Matter
      Pages 773-773
    2. Wataru Natsu
      Pages 807-855
    3. Takayuki Shibata, Junji Sasano, Moeto Nagai
      Pages 857-880
    4. Satoru Takahashi
      Pages 881-901

About this book

Introduction

This volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary technologies include mechanical, electrical, optical, physical, and chemical methods, as well as hybrid processes, covering subtractive and additive material manufacturing, as well as net-shape manufacturing. The materials the volume deals with include metals, alloys, semiconductors, polymers, crystals, glass, ceramics, composites, and nanomaterials. The volume is composed of 30 chapters, which are grouped into five parts. Engaging with the latest research in the field, these chapters provide important perspectives on key topics, from process developments at the shop level to scientific investigations at the academic level, offering both experimental work and theoretical analysis. Moreover, the content of this volume is highly interdisciplinary in nature, with insights from not only manufacturing technology but also mechanical/material science, optics, physics, chemistry, and more.

Keywords

Micro and Nano Fabrication Technology Nano medicine materials Nanomaterials Laser micro Micro fluid and bio MEMS Mesoscale mechanics Medicine targeting technologies Sensors Information storage

Editors and affiliations

  • Jiwang Yan
    • 1
  1. 1.Department of Mechanical EngineeringKeio UniversityYokohamaJapan

Bibliographic information

  • DOI https://doi.org/10.1007/978-981-13-0098-1
  • Copyright Information Springer Nature Singapore Pte Ltd. 2018
  • Publisher Name Springer, Singapore
  • eBook Packages Engineering
  • Print ISBN 978-981-13-0097-4
  • Online ISBN 978-981-13-0098-1
  • Series Print ISSN 2522-5065
  • Series Online ISSN 2522-5073
  • Buy this book on publisher's site
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