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Table of contents

  1. Front Matter
    Pages i-xvii
    PDF
  2. Dimensional Metrology Using Mode-Locked Lasers
    Seung-Woo Kim, Yoon-Soo Jang, Jiyong Park, Wooram Kim
    Pages 1-34
  3. Nanopositioning and Nanomeasuring Machines
    Eberhard Manske
    Pages 35-58
  4. Confocal Microscopy for Surface Profilometry
    Liang-Chia Chen
    Pages 59-92
  5. Optical Sensors for Machine Tool Metrology
    Zhi-Feng Lou, Kuang-Chao Fan
    Pages 93-122
  6. Optical Micro-CMM
    Yasuhiro Takaya, Masaki Michihata
    Pages 123-188
  7. Machine Tool Calibration
    J. R. R. Mayer
    Pages 189-214
  8. Accuracy and Performance Analysis of Machine Tools
    Andreas Archenti, Theodoros Laspas
    Pages 215-244
  9. Machine Tool Prognosis for Precision Manufacturing
    Robert X. Gao, Peng Wang, Ruqiang Yan
    Pages 245-276
  10. Cylindrical Gear Metrology
    Kang Ni, Yue Peng, Dirk Stöbener, Gert Goch
    Pages 277-306
  11. High-Speed Measurement of Complex Shaped Parts by Laser Triangulation for In-Line Inspection
    Alexander Schöch, Enrico Savio
    Pages 307-328
  12. Micro-dimensional Measurement by a Micro-probing System
    So Ito
    Pages 329-368
  13. Measurements in Additive Manufacturing
    David Bue Pedersen, Sebastian Aagaard Andersen, Hans Nørgaard Hansen
    Pages 369-397
  14. In-Line Measurement Technology and Quality Control
    Gisela Lanza, Benjamin Haefner, Leonard Schild, Dietrich Berger, Niclas Eschner, Raphael Wagner et al.
    Pages 399-433
  15. In-Process Measurement of Subwavelength Structures
    Satoru Takahashi
    Pages 435-475
  16. Optical Scatterometry for Nanostructure Metrology
    Xiuguo Chen, Shiyuan Liu
    Pages 477-513
  17. Contact-Type Micro Thermal Sensor for Surface Defect Detection
    Yuki Shimizu
    Pages 515-535
  18. X-Ray Computed Tomography for Dimensional Metrology
    Filippo Zanini, Simone Carmignato
    Pages 537-583
  19. Uncertainty Estimation in Computational Tools in Metrology
    Jean-Marc Linares
    Pages 585-600
  20. Molecular Dynamics Characterization of a Force Sensor Integrated Fast Tool Servo for On-Machine Surface Metrology
    Yindi Cai
    Pages 601-629

About this book

Introduction

The aim of this handbook is to provide a comprehensive summary of sensing and measurement in precision manufacturing, which is essential for process and quality control. The importance of precision sensing and measurements lies not only in the ability to distinguish whether the manufactured part meets the assigned tolerances through inspection but also, in many cases, reduce the deviation of the manufactured part from the designed values through improvement of the process or compensation manufacturing based on the sensing and measurement results. The information provided in the book will be of interest to industrial practitioners and researchers in the field of precision manufacturing sensing and measurements.

This volume is part of a handbook series that covers a comprehensive range of scientific and technological matters in ‘Precision Manufacturing’.

Keywords

Process Control Precision Length Sensors Precision Angle Sensors Surface Finish Measurement Large-Scale Measurement Microstructure Measurement Nano-Metrology Error Motion Measurement Thermal Measurement Compensation Internal Defects Measurement

Editors and affiliations

  • Wei Gao
    • 1
  1. 1.Tohoku University Department of FinemechanicsSendaiJapan

Bibliographic information

  • DOI https://doi.org/10.1007/978-981-10-4938-5
  • Copyright Information Springer Nature Singapore Pte Ltd. 2019
  • Publisher Name Springer, Singapore
  • eBook Packages Engineering
  • Print ISBN 978-981-10-4937-8
  • Online ISBN 978-981-10-4938-5
  • Series Print ISSN 2522-5464
  • Series Online ISSN 2522-5472
  • Buy this book on publisher's site
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