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Introduction to Glass Microstructuring Techniques

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Book cover Microfluidic Diagnostics

Part of the book series: Methods in Molecular Biology ((MIMB,volume 949))

Abstract

In this chapter an overview of manufacturing methods, leading to the fabrication of microstructures in glass substrates, is presented. Glass is a material of excellent optical properties, a very good electric insulator, biocompatible and chemically stable. In addition to its intrinsic qualities, glass can be processed with the use of manufacturing methods originating from the microelectronic industry. In this text two complete manufacturing protocols are described, each composed of standard microfabrication steps; namely, the deposition of masking layers, photolithographic patterning and pattern transfer via wet or dry etching. As a result, a set of building blocks is provided, allowing the manufacture of various microfluidic components that are frequently used in the domain of micro-total analysis system technology.

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Acknowledgments

This research was supported by the NANOLYON technological platform of the Institut des Nanotechnologies de Lyon (INL), which provided us with access to its technological facilities.

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Authors and Affiliations

  1. Institut des Nanotechnologies de Lyon (INL), UMR CNRS 5270, Ecully Cedex, France

    Radoslaw Mazurczyk

  2. Institut des Nanotechnologies de Lyon (INL), UMR CNRS, Ecully Cedex, France

    Colin D. Mansfield

Authors
  1. Radoslaw Mazurczyk
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  2. Colin D. Mansfield
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Corresponding author

Correspondence to Radoslaw Mazurczyk .

Editor information

Editors and Affiliations

  1. Key Laboratory for Organic Electronics &, Information Displays (KLOEID), Nanjing Univ. of Posts&Telecommunication, Jia Sheng Hua Yuan, No.2 Building Room 201, Nanjing, 210013, Jiangsu, China, People's Republic

    Gareth Jenkins

  2. Scientific & Medical Communications Cons, avenue Paul Santy 1C, Ecully, 69130, France

    Colin D. Mansfield

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Mazurczyk, R., Mansfield, C.D. (2013). Introduction to Glass Microstructuring Techniques. In: Jenkins, G., Mansfield, C. (eds) Microfluidic Diagnostics. Methods in Molecular Biology, vol 949. Humana Press, Totowa, NJ. https://doi.org/10.1007/978-1-62703-134-9_9

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  • DOI: https://doi.org/10.1007/978-1-62703-134-9_9

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  • Publisher Name: Humana Press, Totowa, NJ

  • Print ISBN: 978-1-62703-133-2

  • Online ISBN: 978-1-62703-134-9

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